Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo (Speaker), Ylivaara, O. M. E. (Speaker), Tero Pilvi (Speaker), Tommi Suni (Speaker)

Activity: Talk or presentation typesOral presentation

Period31 Jul 2018
Held at18th International Conference on Atomic Layer Deposition, ALD/ALE 2018
Event typeConference
LocationIncheon, Korea, Republic of

Keywords

  • ALD
  • Atomic Layer Deposition
  • Residual Stress