Stresses in ALD films: Aiming for zero stress thin films

  • Riina Ritasalo (Speaker)
  • Ylivaara, O. M. E. (Speaker)
  • Tero Pilvi (Speaker)
  • Tommi Suni (Speaker)

    Activity: Talk or presentation typesConference presentation

    Period31 Jul 2018
    Event title18th International Conference on Atomic Layer Deposition, ALD/ALE 2018: Featuring the 5th International Atomic Layer Etching Workshop
    Event typeConference
    LocationIncheon, Korea, Republic of

    Keywords

    • ALD
    • Atomic Layer Deposition
    • Residual Stress