Facility/equipment: Facility



      OtaNano is a national research infrastructure focusing on competitive research in nanoscience and -technology, and in quantum technologies.

      OtaNano open access research infrastructure, operated by Aalto University and VTT, is available for academic and commercial users internationally.

      More information: https://www.aalto.fi/en/otanano

      Fingerprint Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.

    • Research Output

      Al2O3 Thin Films Prepared by a Combined Thermal-Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

      Zhu, Z., Merdes, S., Ylivaara, O. M. E., Mizohata, K., Heikkilä, M. J. & Savin, H., 1 Apr 2020, In : Physica Status Solidi A: Applications and Materials Science. 217, 8, 1900237.

      Research output: Contribution to journalArticleScientificpeer-review

    • 1.3μm u-bend traveling wave SOA devices for high efficiency coupling to silicon photonics

      Viheriälä, J., Tuorila, H., Zia, N., Cherchi, M., Aalto, T. & Guina, M., 4 Mar 2019, Silicon Photonics XIV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 7 p. 109230E. (Proceedings of SPIE, Vol. 10923).

      Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    • A 71–76 GHz wideband receiver front-end for phased array applications in 0.13 μm SiGe BiCMOS technology

      Ahamed, R., Varonen, M., Holmberg, J., Parveg, D., Kantanen, M., Saijets, J. & Halonen, K. A. I., 15 Mar 2019, In : Analog Integrated Circuits and Signal Processing. 98, 3, p. 465-476 12 p.

      Research output: Contribution to journalArticleScientificpeer-review