Fingerprint Dive into the research topics where BA14 Sensing and integration is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Silicon Chemical Compounds
silicon Physics & Astronomy
MEMS Engineering & Materials Science
Printing Engineering & Materials Science
Sensors Engineering & Materials Science
Substrates Engineering & Materials Science
microelectromechanical systems Physics & Astronomy
sensors Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Profiles

No photo of Jouni Ahopelto

Jouni Ahopelto

Person: Research Professors, Senior Advisors

19842019
No photo of Mauri Aikio

Mauri Aikio

Person: Senior Principal Scientists, Principal Scientists

19902017
No photo of Rami Aikio

Rami Aikio

Person: Research Scientists

20092017

Projects 2012 2021

Research Output 1984 2019

0.6V threshold voltage thin film transistors with solution processable indium oxide (In2O3) Channel and Anodized High-κ Al2O3 Dielectric

Bhalerao, S. R., Lupo, D., Zangiabadi, A., Kymissis, I., Leppaniemi, J., Alastalo, A. & Berger, P. R., 22 May 2019, In : IEEE Electron Device Letters. 40, 7, p. 1112-1115 4 p., 8720175.

Research output: Contribution to journalArticleScientificpeer-review

Thin film transistors
Threshold voltage
Indium
Oxides
Transistors

Active Hyperspectral Sensor Based on MEMS Fabry-Pérot Interferometer

Kääriäinen, T., Jaanson, P., Vaigu, A., Mannila, R. & Manninen, A., 2019, In : Sensors. 19, 9, 2192.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Micro-Electrical-Mechanical Systems
Interferometers
microelectromechanical systems
MEMS
interferometers

All-optical difference engine for in-process defect inspection for roll-to-roll printed electronics

Feng, X., Su, R., Happonen, T., Liu, J. & Leach, R., 7 Mar 2019, Tenth International Symposium on Precision Engineering Measurements and Instrumentation. Tan, J. & Lin, J. (eds.). International Society for Optics and Photonics SPIE, p. 1105308-1-1105308-8 8 p. 1105308. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11053).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Defect Inspection
engines
inspection
Engine
Electronic equipment

Prizes

2017 EuMC Microwave Prize

Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017

Prize

microwave

Activities 2018 2018

  • 2 Oral presentation

Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Tero Pilvi (Speaker), Tommi Suni (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation