Fingerprint Dive into the research topics where BA14 Sensing and integration is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Silicon Chemical Compounds
silicon Physics & Astronomy
Printing Engineering & Materials Science
MEMS Engineering & Materials Science
Substrates Engineering & Materials Science
Sensors Engineering & Materials Science
microelectromechanical systems Physics & Astronomy
sensors Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.


No photo of Jouni Ahopelto

Jouni Ahopelto

Person: Research Professors, Senior Advisors

No photo of Mauri Aikio

Mauri Aikio

Person: Senior Principal Scientists, Principal Scientists

No photo of Sanna Aikio

Sanna Aikio

Person: Senior Scientists


Projects 2012 2021

Research Output 1982 2019

0.6V threshold voltage thin film transistors with solution processable indium oxide (In2O3) Channel and Anodized High-κ Al2O3 Dielectric

Bhalerao, S. R., Lupo, D., Zangiabadi, A., Kymissis, I., Leppaniemi, J., Alastalo, A. & Berger, P. R., 22 May 2019, In : IEEE Electron Device Letters. 40, 7, p. 1112-1115 4 p., 8720175.

Research output: Contribution to journalArticleScientificpeer-review

Thin film transistors
Threshold voltage

Active Hyperspectral Sensor Based on MEMS Fabry-Pérot Interferometer

Kääriäinen, T., Jaanson, P., Vaigu, A., Mannila, R. & Manninen, A., 2019, In : Sensors. 19, 9, 2192.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Micro-Electrical-Mechanical Systems
microelectromechanical systems

Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

high aspect ratio
image analysis
atomic layer epitaxy


2017 EuMC Microwave Prize

Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017



Activities 2014 2018

  • 2 Oral presentation
  • 1 Organising a conference, workshop, ...
  • 1 Publication Peer-review

Nanoscale and Microscale Heat Transfer VI, NMHT-VI

Alberto Ronzani (Participant)
2 Dec 20187 Dec 2018

Activity: Participating in or organising an event typesOrganising a conference, workshop, ...

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation

Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Tero Pilvi (Speaker), Tommi Suni (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation