Fingerprint Dive into the research topics where BA1401 MEMS is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

atomic layer epitaxy Physics & Astronomy
MEMS Engineering & Materials Science
Atomic layer deposition Engineering & Materials Science
Silicon Engineering & Materials Science
microelectromechanical systems Physics & Astronomy
Resonators Engineering & Materials Science
silicon Physics & Astronomy
resonators Physics & Astronomy

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No photo of Henri Ailas

Henri Ailas

Person: Research Scientists

No photo of Erno Damskägg

Erno Damskägg

Person: Research Scientists

No photo of Gabriela dos Santos Kotila

Gabriela dos Santos Kotila

Person: Research Trainees

Projects 2012 2021

Research Output 1984 2019

1 Citation (Scopus)

Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam

Korovin, A. V., Pennec, Y., Stocchi, M., Mencarelli, D., Pierantoni, L., Makkonen, T., Ahopelto, J. & Djafari Rouhani, B., 6 Jun 2019, In : Journal of Physics D: Applied Physics. 52, 32, 32LT01.

Research output: Contribution to journalArticleScientificpeer-review

Surface waves
Acoustic waves

Copper thermocompression for MEMS encapsulation: Master’s thesis

Ailas, H., 7 May 2019, Aalto University. 97 p.

Research output: ThesisMaster's thesisTheses

Open Access

Intercalation of Lithium Ions from Gaseous Precursors into β-MnO 2 Thin Films Deposited by Atomic Layer Deposition

Nieminen, H-E., Miikkulainen, V., Settipani, D., Simonelli, L., Hönicke, P., Zech, C., Kayser, Y., Beckhoff, B., Honkanen, A-P., Heikkilä, M. J., Mizohata, K., Meinander, K., Ylivaara, O. M. E., Huotari, S. & Ritala, M., 27 Jun 2019, In : Journal of Physical Chemistry C. 123, 25, p. 15802-15814 13 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition
atomic layer epitaxy


2017 EuMC Microwave Prize

Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017



Activities 2018 2018

  • 2 Oral presentation

Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Tero Pilvi (Speaker), Tommi Suni (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation