Fingerprint Dive into the research topics where BA1401 MEMS is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

atomic layer epitaxy Physics & Astronomy
MEMS Engineering & Materials Science
Atomic layer deposition Engineering & Materials Science
Silicon Engineering & Materials Science
microelectromechanical systems Physics & Astronomy
silicon Physics & Astronomy
Resonators Engineering & Materials Science
resonators Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.


No photo of Henri Ailas

Henri Ailas

Person: Research Scientists

No photo of Erno Damskägg

Erno Damskägg

Person: Research Scientists

No photo of Gabriela dos Santos Kotila

Gabriela dos Santos Kotila

Person: Research Trainees

Projects 2012 2021

Research Output 1983 2019

Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

high aspect ratio
image analysis
atomic layer epitaxy

Al2O3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

Zhu, Z., Merdes, S., Ylivaara, O. M. E., Mizohata, K., Heikkilä, M. J. & Savin, H., 2019, In : Physica Status Solidi A: Applications and Materials Science. 1900237.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition
atomic layer epitaxy
residual stress
Residual stresses

Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhu, Z., Merdes, S., Mizohata, K., Ylivaara, O. M. E., Heikkilä, M. J. & Salmi, E., 25 Jun 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review


2017 EuMC Microwave Prize

Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017



Activities 2018 2018

  • 2 Oral presentation

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation

Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Tero Pilvi (Speaker), Tommi Suni (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation