Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

atomic layer epitaxy Physics & Astronomy
Atomic layer deposition Engineering & Materials Science
Silicon Engineering & Materials Science
MEMS Engineering & Materials Science
Resonators Engineering & Materials Science
microelectromechanical systems Physics & Astronomy
silicon Physics & Astronomy
resonators Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.


No photo of Henri Ailas

Henri Ailas

Person: Research Trainees

No photo of Erno Damskägg

Erno Damskägg

Person: Research Scientists

No photo of Feng Gao

Feng Gao

Person: Research Scientists


Projects 2012 2018

Research Output 1987 2019

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide

Zhu, Z., Sippola, P., Ylivaara, O., Modanese, C., Di Sabatino, M., Mizohata, K., Merdes, S., Lipsanen, H. & Savin, H., 2019, In : Nanoscale Research Letters. 14, 8 p., 55.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Atomic layer deposition
cold plasmas
atomic layer epitaxy
Carbon Dioxide
carbon dioxide

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleResearchpeer-review

Open Access
Electric Impedance

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3

Utriainen, M., Arts, K., Vandalon, V., Gao, F., Puurunen, R. L., Kessels, E. & Knoops, H., 22 Jan 2019.

Research output: Contribution to conferenceConference AbstractResearchpeer-review


47th EuMC Microwave Prize

Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017


honors and awards

Activities 2018 2018

  • 2 Oral presentation

Stresses in ALD films: Aiming for zero stress thin films

Riina Ritasalo (Speaker), Oili M.E. Ylivaara (Speaker), Tero Pilvi (Speaker), Tommi Suni (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation

Thin-Film Conformality Analysis, Reliability and Modeling using All-Silicon Lateral High Aspect Ratio Structures

Oili M.E. Ylivaara (Speaker), Virpi Korpelainen (Speaker), Markku Ylilammi (Speaker), Riikka L. Puurunen (Speaker)
31 Jul 2018

Activity: Talk or presentation typesOral presentation