Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Capillary electrophoresis Chemical Compounds
Atomic layer deposition Chemical Compounds
Quartz crystal microbalances Chemical Compounds
Electrodeposition Chemical Compounds
electrodeposition Physics & Astronomy
baths Physics & Astronomy
thin films Physics & Astronomy
resonators Physics & Astronomy

Profiles

No photo of Ulrika Gyllenberg

Ulrika Gyllenberg

Person: Senior Specialists, Specialists and Controllers

20032003
No photo of Pasi Haapasalo

Pasi Haapasalo

Person: Senior Research Technicians, Research Technicians

No photo of Teija Häkkinen

Teija Häkkinen

Person: Senior Research Technicians, Research Technicians

19991999

Research Output 1999 2018

  • 9 Article
  • 5 Conference article in proceedings
  • 1 Thesis
1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients

Digest of Technical Papers: Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T. T., Pirkkalainen, J-M., Cho, S-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. Institute of Electrical and Electronic Engineers IEEE, Vol. 56. p. 198 - 199 6487698

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

tunable filters
quartz
relaxation time
resonators
communication
9 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleResearchpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems