Fingerprint Dive into the research topics where BA18 Micronova manufacturing services is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Capillary electrophoresis Chemical Compounds
Atomic layer deposition Chemical Compounds
Quartz crystal microbalances Chemical Compounds
atomic layer epitaxy Physics & Astronomy
Electrodeposition Chemical Compounds
electrodeposition Physics & Astronomy
thin films Physics & Astronomy
resonators Physics & Astronomy

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Profiles

No photo of Ulrika Gyllenberg

Ulrika Gyllenberg

Person: Senior Specialists, Specialists and Controllers

19872003
No photo of Pasi Haapasalo

Pasi Haapasalo

Person: Senior Research Technicians, Research Technicians

No photo of Teija Häkkinen

Teija Häkkinen

Person: Senior Research Technicians, Research Technicians

19991999

Research Output 1987 2019

Calibration of cryogenic amplification chains using normal-metal-insulator-superconductor junctions

Hyyppä, E., Jenei, M., Masuda, S., Sevriuk, V., Tan, K. Y., Silveri, M., Goetz, J., Partanen, M., Lake, R. E., Grönberg, L. & Möttönen, M., 17 May 2019, In : Applied Physics Letters. 114, 19, 192603.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
cryogenics
insulators
metals
noise temperature
electric potential
1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients

Digest of Technical Papers: Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T. T., Pirkkalainen, J-M., Cho, S-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. Institute of Electrical and Electronic Engineers IEEE, Vol. 56. p. 198 - 199 6487698

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

tunable filters
quartz
relaxation time
resonators
communication