Research Output 1987 2019

2019

Calibration of cryogenic amplification chains using normal-metal-insulator-superconductor junctions

Hyyppä, E., Jenei, M., Masuda, S., Sevriuk, V., Tan, K. Y., Silveri, M., Goetz, J., Partanen, M., Lake, R. E., Grönberg, L. & Möttönen, M., 17 May 2019, In : Applied Physics Letters. 114, 19, 192603.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
cryogenics
insulators
metals
noise temperature
electric potential
2018
1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients
2013

Digest of Technical Papers: Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T. T., Pirkkalainen, J-M., Cho, S-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. Institute of Electrical and Electronic Engineers IEEE, Vol. 56. p. 198 - 199 6487698

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

tunable filters
quartz
relaxation time
resonators
communication

Membranes and tubules by nanoimprinting and atomic layer deposition

Haatainen, T., Kainlauri, M., Arpiainen, S., Markkanen, M., Marles, J., Puurunen, R. & Ahopelto, J., 2013.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

atomic layer epitaxy
membranes
polymers
lamella
fabrication
2012
9 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleScientificpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems
2011
140 Citations (Scopus)

Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T., Pirkkalainen, J-M., Cho, S., Saloniemi, H., Hakonen, P. & Sillanpää, M., 2011, In : Nature. 480, p. 351-354 4 p.

Research output: Contribution to journalArticleScientificpeer-review

resonators
microwaves
superconducting devices
radiation pressure
stimulated emission
2010
45 Citations (Scopus)

Effect of corona pre-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer coated paperboard

Hirvikorpi, T., Vähä-Nissi, M., Harlin, A., Marles, J., Miikkulainen, V. & Karppinen, M., 2010, In : Applied Surface Science. 257, 3, p. 736 - 740

Research output: Contribution to journalArticleScientificpeer-review

Paperboards
Atomic layer deposition
Polymers
Gases
Biopolymers
2008

Utilising Social Media Tools in User-Centred Design

Näkki, P. & Virtanen, T., 2008, Social Media: Concepts and Marketing Applications (K. Suresh, ed.). Suresh, K. (ed.). Hyderabad, India, p. 81-88

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Feedback
User centered design
2004
4 Citations (Scopus)

Ion beam studies of hydrogen implanted Si wafers

Nurmela, A., Henttinen, K., Suni, Tolkki, A. & Suni, I., 2004, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 219, p. 747 - 750 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Ion beams
implantation
ion beams
wafers
Hydrogen
2003

New microelectronics cleanroom facility in Otaniemi: User's view on the building process

Gyllenberg, U., 2003, 34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland, p. 299-310 (VTT Symposium; No. 229).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Open Access

Stability and Residue Studies of Complexing Agents in SC-1 Bath

Saloniemi, H., Eränen, S., Ketola, R. A., Kokkonen, J., Lehto, S., Luomanperä, K., Vastamäki, P., Sirén, H. & Anttila, O., 2003, Ultra Clean Processing of Silicon Surfaces VI. Heyns, M., Mertens, P. & Meuris, M. (eds.). p. 41-44 (Solid State Phenomena, Vol. 92).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Capillary electrophoresis
Electrospray ionization
Mass spectrometry
Etidronic Acid
Secondary ion mass spectrometry

Stability and residue studies on complexing agents in SC-1 bath

Saloniemi, H., Eränen, S., Ketola, R., Kokkonen, J., Lehto, S., Luomaperä, K., Vastamäki, P., Siren, H. & Anttila, O., 2003, Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Heyns, M. & Mertens, P. (eds.). Trans Tech Publications, p. 41

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

2002

Concentration methods for the detection of trace elements in UPW

Eränen, S., Saloniemi, H., Hintsala, J. & Luusua, I., 2002, In : Physica Scripta. 2002, T101, p. 196-199

Research output: Contribution to journalArticleScientificpeer-review

Impurities
trace elements
Trace
impurities
Absorption Spectroscopy

Determination of phosphonate chelating agents by capillary electrophoresis

Luomanperä, K., Vastamäki, P., Saloniemi, H. & Siren, H., 2002, ITP 2002, 13th International Symposium on Capillary Electroseparation Techniques: program and book of abstracts. Helsinki: University of Helsinki, 137

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Capillary electrophoresis
Organophosphonates
Chelating Agents
Metals
Etidronic Acid

Nanosåll nytt hjälpmedel inom mikromekaniken

Kattelus, H., Saarilahti, J., Kiihamäki, J. & Gyllenberg, U., 2002, In : Elektronik i Norden. 19, del 2/40.

Research output: Contribution to journalArticleProfessional

2001
21 Citations (Scopus)

Electrochemical quartz crystal microbalance study of the electrodeposition mechanisms of CuInSe2 thin films

Kemell, M., Saloniemi, H., Ritala, M. & Leskelä, M., 2001, In : Journal of the Electrochemical Society. 148, 2, p. C110-C118 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Quartz crystal microbalances
Electrodeposition
Thin films
Cyclic voltammetry
12 Citations (Scopus)

Electrochemical quartz crystal microbalance study on cyclic electrodeposition of PbS thin-films

Saloniemi, H., Kemell, M., Ritala, M. & Leskelä, M., 2001, In : Thin Solid Films. 386, 1, p. 32-40 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Quartz crystal microbalances
quartz crystals
Electrodeposition
electrodeposition
microbalances
2000

Electrodeposition of PbS, PbSe and PbTe thin films: Dissertation

Saloniemi, H., 2000, Espoo: VTT Technical Research Centre of Finland. 84 p.

Research output: ThesisDissertationCollection of Articles

Open Access
electrodeposition
thin films
quartz crystals
microbalances
electrical resistivity
1999

Characterization of wet chemistry resist and resist residues removal processes

Muukkonen, E., Häkkinen, T., Riihisaari, T., Eränen, S., Luusua, I., Kiviranta, A. & Savolahti, P., 1999, In : Physica Scripta. T79, p. 255-258 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Resist
Chemistry
baths
chemistry
x ray fluorescence
1987

Elektrokromiset kalvot

Nyman, C., Gyllenberg, U. & Leppihalme, M., 1987, Espoo: VTT Technical Research Centre of Finland. 46 p. (Valtion teknillinen tutkimuskeskus. Tiedotteita; No. 727).

Research output: Book/ReportReportProfessional