Research Output 1987 2019

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Conference article in proceedings
2018
1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients
2013

Digest of Technical Papers: Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T. T., Pirkkalainen, J-M., Cho, S-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. Institute of Electrical and Electronic Engineers IEEE, Vol. 56. p. 198 - 199 6487698

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

tunable filters
quartz
relaxation time
resonators
communication
2003

New microelectronics cleanroom facility in Otaniemi: User's view on the building process

Gyllenberg, U., 2003, 34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland, p. 299-310 (VTT Symposium; No. 229).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Open Access

Stability and Residue Studies of Complexing Agents in SC-1 Bath

Saloniemi, H., Eränen, S., Ketola, R. A., Kokkonen, J., Lehto, S., Luomanperä, K., Vastamäki, P., Sirén, H. & Anttila, O., 2003, Ultra Clean Processing of Silicon Surfaces VI. Heyns, M., Mertens, P. & Meuris, M. (eds.). p. 41-44 (Solid State Phenomena, Vol. 92).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Capillary electrophoresis
Electrospray ionization
Mass spectrometry
Etidronic Acid
Secondary ion mass spectrometry

Stability and residue studies on complexing agents in SC-1 bath

Saloniemi, H., Eränen, S., Ketola, R., Kokkonen, J., Lehto, S., Luomaperä, K., Vastamäki, P., Siren, H. & Anttila, O., 2003, Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Heyns, M. & Mertens, P. (eds.). Trans Tech Publications, p. 41

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

2002

Determination of phosphonate chelating agents by capillary electrophoresis

Luomanperä, K., Vastamäki, P., Saloniemi, H. & Siren, H., 2002, ITP 2002, 13th International Symposium on Capillary Electroseparation Techniques: program and book of abstracts. Helsinki: University of Helsinki, 137

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Capillary electrophoresis
Organophosphonates
Chelating Agents
Metals
Etidronic Acid