Research Output 1999 2018

  • 9 Article
  • 5 Conference article in proceedings
  • 1 Conference Abstract
  • 1 Dissertation
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Article
2012
9 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleScientificpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems
2011
137 Citations (Scopus)

Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T., Pirkkalainen, J-M., Cho, S., Saloniemi, H., Hakonen, P. & Sillanpää, M., 2011, In : Nature. 480, p. 351-354 4 p.

Research output: Contribution to journalArticleScientificpeer-review

resonators
microwaves
superconducting devices
radiation pressure
stimulated emission
2010
45 Citations (Scopus)

Effect of corona pre-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer coated paperboard

Hirvikorpi, T., Vähä-Nissi, M., Harlin, A., Marles, J., Miikkulainen, V. & Karppinen, M., 2010, In : Applied Surface Science. 257, 3, p. 736 - 740

Research output: Contribution to journalArticleScientificpeer-review

Paperboards
Atomic layer deposition
Polymers
Gases
Biopolymers
2004
4 Citations (Scopus)

Ion beam studies of hydrogen implanted Si wafers

Nurmela, A., Henttinen, K., Suni, Tolkki, A. & Suni, I., 2004, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 219, p. 747 - 750 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Ion beams
implantation
ion beams
wafers
Hydrogen
2003

Stability and Residue Studies of Complexing Agents in SC-1 Bath

Saloniemi, H., Eränen, S., Ketola, R. A., Kokkonen, J., Lehto, S., Luomanperä, K., Vastamäki, P., Sirén, H. & Anttila, O., 2003, In : Solid State Phenomena. 92, p. 41-44

Research output: Contribution to journalArticleScientificpeer-review

Capillary electrophoresis
Electrospray ionization
electrophoresis
Mass spectrometry
baths
2002

Concentration methods for the detection of trace elements in UPW

Eränen, S., Saloniemi, H., Hintsala, J. & Luusua, I., 2002, In : Physica Scripta. 2002, T101, p. 196-199

Research output: Contribution to journalArticleScientificpeer-review

Impurities
trace elements
Trace
impurities
Absorption Spectroscopy
2001
21 Citations (Scopus)

Electrochemical quartz crystal microbalance study of the electrodeposition mechanisms of CuInSe2 thin films

Kemell, M., Saloniemi, H., Ritala, M. & Leskelä, M., 2001, In : Journal of the Electrochemical Society. 148, 2, p. C110-C118 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Quartz crystal microbalances
Electrodeposition
Thin films
Cyclic voltammetry
12 Citations (Scopus)

Electrochemical quartz crystal microbalance study on cyclic electrodeposition of PbS thin-films

Saloniemi, H., Kemell, M., Ritala, M. & Leskelä, M., 2001, In : Thin Solid Films. 386, 1, p. 32-40 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Quartz crystal microbalances
quartz crystals
Electrodeposition
electrodeposition
microbalances
1999

Characterization of wet chemistry resist and resist residues removal processes

Muukkonen, E., Häkkinen, T., Riihisaari, T., Eränen, S., Luusua, I., Kiviranta, A. & Savolahti, P., 1999, In : Physica Scripta. T79, p. 255-258 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Resist
Chemistry
baths
chemistry
x ray fluorescence