Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Resist Mathematics
Chemistry Mathematics
baths Physics & Astronomy
chemistry Physics & Astronomy
x ray fluorescence Physics & Astronomy
stripping Physics & Astronomy
chemical analysis Physics & Astronomy
cleaning Physics & Astronomy

Profiles

No photo of Teija Häkkinen

Teija Häkkinen

Person: Senior Research Technicians, Research Technicians

19991999
No photo of Tuomo Honkaharju

Tuomo Honkaharju

Person: Senior Research Technicians, Research Technicians

No photo of Kirsi Järvi

Kirsi Järvi

Person: Senior Research Technicians, Research Technicians

Research Output 1999 1999

Characterization of wet chemistry resist and resist residues removal processes

Muukkonen, E., Häkkinen, T., Riihisaari, T., Eränen, S., Luusua, I., Kiviranta, A. & Savolahti, P., 1999, In : Physica Scripta. T79, p. 255-258 4 p.

Research output: Contribution to journalArticleResearchpeer-review

Resist
Chemistry
baths
chemistry
x ray fluorescence