Fingerprint Dive into the research topics where BA1802 Process engineering is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

Capillary electrophoresis Chemical Compounds
Atomic layer deposition Chemical Compounds
Quartz crystal microbalances Chemical Compounds
atomic layer epitaxy Physics & Astronomy
Electrodeposition Chemical Compounds
electrodeposition Physics & Astronomy
wafers Physics & Astronomy
thin films Physics & Astronomy

Profiles

No photo of Pasi Haapasalo

Pasi Haapasalo

Person: Senior Research Technicians, Research Technicians

No photo of Jussi P. Hämäläinen

Jussi P. Hämäläinen

Person: Senior Research Technicians, Research Technicians

No photo of Jukka Huhtala

Jukka Huhtala

Person: Senior Research Technicians, Research Technicians

Research Output 2000 2018

1 Citation (Scopus)

High-Volume Production and Non-Destructive Piezo-Property Mapping of 33% SC Doped Aluminium Nitride Thin Films

Mertin, S., Heinz, B., Mazzalar, A., Schmitz-Kempen, T., Tiedke, S. & Pensala, T., 2018, 2018 IEEE International Ultrasonics Symposium, IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 8580120

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
thin films
wafers
scandium
coefficients

Digest of Technical Papers: Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T. T., Pirkkalainen, J-M., Cho, S-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. Institute of Electrical and Electronic Engineers IEEE, Vol. 56. p. 198 - 199 6487698

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

tunable filters
quartz
relaxation time
resonators
communication

Membranes and tubules by nanoimprinting and atomic layer deposition

Haatainen, T., Kainlauri, M., Arpiainen, S., Markkanen, M., Marles, J., Puurunen, R. & Ahopelto, J., 2013.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

atomic layer epitaxy
membranes
polymers
lamella
fabrication