Fingerprint Dive into the research topics where BA191A MEMS is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

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    No photo of Henri Ailas

    Henri Ailas

    Person: Research Scientists

    No photo of Erno Damskägg

    Erno Damskägg

    Person: Research Scientists

    No photo of James R. Dekker

    James R. Dekker

    Person: Senior Scientists


    Research Output

    Al2O3 Thin Films Prepared by a Combined Thermal-Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

    Zhu, Z., Merdes, S., Ylivaara, O. M. E., Mizohata, K., Heikkilä, M. J. & Savin, H., 1 Apr 2020, In : Physica Status Solidi A: Applications and Materials Science. 217, 8, 1900237.

    Research output: Contribution to journalArticleScientificpeer-review

  • Monolithic integration of up to 40 GHz Ge photodetectors in 3μm SOI

    Vehmas, T., Kapulainen, M., Heimala, P., Delrosso, G., Sun, F., Gao, F. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 112850V. (Proceedings of SPIE, Vol. 11285).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Multiplexed mycotoxins determination employing white light reflectance spectroscopy and silicon chips with silicon oxide areas of different thickness

    Anastasiadis, V., Koukouvinos, G., Petrou, P. S., Economou, A., Dekker, J., Harjanne, M., Heimala, P., Goustouridis, D., Raptis, I. & Kakabakos, S. E., 1 Apr 2020, In : Biosensors and Bioelectronics. 153, 112035.

    Research output: Contribution to journalArticleScientificpeer-review