Fingerprint Dive into the research topics where BA191A MEMS is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

aluminum nitrides Physics & Astronomy
resonators Physics & Astronomy
flow measurement Physics & Astronomy
air flow Physics & Astronomy
coupling coefficients Physics & Astronomy
membranes Physics & Astronomy
microelectromechanical systems Physics & Astronomy
field of view Physics & Astronomy

Profiles

No photo of Henri Ailas

Henri Ailas

Person: Research Scientists

20192019
No photo of Erno Damskägg

Erno Damskägg

Person: Research Scientists

No photo of James R. Dekker

James R. Dekker

Person: Senior Scientists

20032019

Research Output 2007 2019

  • 4 Conference article in proceedings

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium (IUS). IEEE Institute of Electrical and Electronic Engineers

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

aluminum nitrides
flow measurement
air flow
transducers
ultrasonics

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., 2019, 2019 IEEE International Ultrasonics Symposium (IUS). IEEE Institute of Electrical and Electronic Engineers , p. 1977-1980 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
field of view
mirrors
frequency scanning
aluminum nitrides
3 Citations (Scopus)

Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

Jansman, A. B. M., Strijbos, R. C., Lobeek, J. W., Vanhelmont, FW. M., Ruigrok, J. J. M., Pensala, T. & Ylilammi, M., 2007, Proceedings: IEEE Ultrasonics Symposium, 2007. p. 1045-1048

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

resonators
membranes
acoustics
profiles
electrical measurement