Research Output

2020

Al2O3 Thin Films Prepared by a Combined Thermal-Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

Zhu, Z., Merdes, S., Ylivaara, O. M. E., Mizohata, K., Heikkilä, M. J. & Savin, H., 1 Apr 2020, In : Physica Status Solidi A: Applications and Materials Science. 217, 8, 1900237.

Research output: Contribution to journalArticleScientificpeer-review

High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

Pitanti, A., Makkonen, T., Colombano, M. F., Zanotto, S., Vicarelli, L., Cecchini, M., Griol, A., Navarro-Urrios, D., Sotomayor-Torres, C., Martinez, A. & Ahopelto, J., 17 Jul 2020, In : Physical Review Applied. 14, 1, 014054.

Research output: Contribution to journalArticleScientificpeer-review

Monolithic integration of up to 40 GHz Ge photodetectors in 3μm SOI

Vehmas, T., Kapulainen, M., Heimala, P., Delrosso, G., Sun, F., Gao, F. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 112850V. (Proceedings of SPIE, Vol. 11285).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Multiplexed mycotoxins determination employing white light reflectance spectroscopy and silicon chips with silicon oxide areas of different thickness

Anastasiadis, V., Koukouvinos, G., Petrou, P. S., Economou, A., Dekker, J., Harjanne, M., Heimala, P., Goustouridis, D., Raptis, I. & Kakabakos, S. E., 1 Apr 2020, In : Biosensors and Bioelectronics. 153, 112035.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Open Access
2019

Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access

Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhu, Z., Merdes, S., Mizohata, K., Ylivaara, O. M. E., Heikkilä, M. J. & Salmi, E., 25 Jun 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Comparison of milk analysis performance between NIR laboratory analyser and miniaturised NIR MEMS sensors

Uusitalo, S., Aernouts, B., Sumen, J., Hietala, E., Utriainen, M. & Pastell, M., 17 Jun 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Open Access

Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

Ylivaara, O. M. E., Yim, J., Ylilammi, M., Utriainen, M. & Puurunen, R. L., 27 Jun 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam

Korovin, A. V., Pennec, Y., Stocchi, M., Mencarelli, D., Pierantoni, L., Makkonen, T., Ahopelto, J. & Djafari Rouhani, B., 6 Jun 2019, In : Journal of Physics D: Applied Physics. 52, 32, 32LT01.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Copper thermocompression for MEMS encapsulation: Master’s thesis

Ailas, H., 7 May 2019, Aalto University. 97 p.

Research output: ThesisMaster's thesis

Open Access

Depth spectroscopy analysis of La-doped HfO2 ALD thin films in 3D structures by HAXPES and ToF-SIMS

Kia, A. M., Mart, C., Haufe, N., Utriainen, M., Puurunen, R. L. & Weinreich, W., 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2489-2492 4 p. 8925544

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Dopant Concentration Analysis of ALD Thin Films in 3D Structures by ToF-SIMS

Kia, A. M., Weinreich, W., Utriainen, M., Puurunen, R. L. & Haufe, N., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS, p. 61-61 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access

Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2

Arts, K., Utriainen, M., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
6 Citations (Scopus)

Intercalation of Lithium Ions from Gaseous Precursors into β-MnO 2 Thin Films Deposited by Atomic Layer Deposition

Nieminen, H-E., Miikkulainen, V., Settipani, D., Simonelli, L., Hönicke, P., Zech, C., Kayser, Y., Beckhoff, B., Honkanen, A-P., Heikkilä, M. J., Mizohata, K., Meinander, K., Ylivaara, O. M. E., Huotari, S. & Ritala, M., 27 Jun 2019, In : Journal of Physical Chemistry C. 123, 25, p. 15802-15814 13 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 8760353

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide

Zhu, Z., Sippola, P., Ylivaara, O., Modanese, C., Di Sabatino, M., Mizohata, K., Merdes, S., Lipsanen, H. & Savin, H., 2019, In : Nanoscale Research Letters. 14, 8 p., 55.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
1 Citation (Scopus)

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access

New pressure sensing elements for FFR coronary catheter

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2592-2595 4 p. 8925964

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

On-farm quality analysis of raw milk: the potential of miniature spectrometers

Aernouts, B., Diaz-Olivares, J., Adriaens, I., Uusitalo, S., Sumen, J., Hietala, E., Utriainen, M., Frondelius, L., Kajava, S. & Pastell, M., Sep 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Physical and Electrical Characterization of ALD Chalcogenide Materials for 3D Memory Applications

Narasimhan, V., Adinolfi, V., Cheng, L., McBriarty, M. E., Utriainen, M., Gao, F., Puurunen, R. L. & Littau, K., 22 Jul 2019, p. 62-62. 1 p.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Radical Surface Recombination Probabilities during Plasma ALD of SiO2, TiO2 and Al2O3 Determined from Film Conformality

Arts, K., Utriainen, M., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 23 Jul 2019, p. 105-106. 1 p.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

SAFTIR - a novel point-of-need diagnostic platform for animal health and food safety

Utriainen, M., Saviranta, P., Aikio, S., Hiltunen, M., Kokkonen, A., Mäyrä, A., Alamäki, M., Vasama, H. & Tappura, K., 1 Jan 2019, Precision Livestock Farming 2019: Papers Presented at the 9th European Conference on Precision Livestock Farming, ECPLF 2019. O'Brien, B., Hennessy, D. & Shalloo, L. (eds.). p. 721-726

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Sensorit tulevat maitotiloille

Utriainen, M., 2019, In : Nauta. 2019, 3, p. 36-39 4 p.

Research output: Contribution to journalArticleProfessional

Open Access

Sensor Technologies in Dairy Farms in Finland

Utriainen, M., Pastell, M., Rinne, M., Kajava, S. & Myllymäki, H., 2019, Precision Livestock Farming 2019: Papers Presented at the 9th European Conference on Precision Livestock Farming, ECPLF 2019. O'Brien, B., Hennessy, D. & Shalloo, L. (eds.). p. 98-104 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Silicon gradient refractive index lens for millimeter wave radiometers

Pursula, P., Lamminen, A., Mannila, R., Tappura, K. & Saarilahti, J., Sep 2019, IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 8874541. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3

Utriainen, M., Arts, K., Vandalon, V., Gao, F., Puurunen, R. L., Kessels, E. & Knoops, H., 22 Jan 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Erwin Kessels, W. M. M. & Knoops, H. C. M., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 37, 3, 030908.

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Stresses in ALD films: aiming for zero stress thin films

Ritasalo, R., Ylivaara, O. M. E., Pilvi, T., Suni, T. & Veselov, A., 14 May 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

ToF-SIMS 3d analysis of thin films deposited in high aspect ratio structures via atomic layer deposition and chemical vapor deposition

Kia, A. M., Haufe, N., Esmaeili, S., Mart, C., Utriainen, M., Puurunen, R. L. & Weinreich, W., Jul 2019, In : Nanomaterials. 9, 7, 1035.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
6 Citations (Scopus)

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
2007

Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

Jansman, A. B. M., Strijbos, R. C., Lobeek, J. W., Vanhelmont, FW. M., Ruigrok, J. J. M., Pensala, T. & Ylilammi, M., 2007, Proceedings: IEEE Ultrasonics Symposium, 2007. p. 1045-1048

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Pensala, T., Ylilammi, M., Johanna, M. & Kokkonen, K., 2007, Proceedings : IEEE Ultrasonics Symposium, IUS 2007. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, p. 1661-1664

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)
2005

Fabrication process for milli-Kelvin Josephson junction circuits

Grönberg, L., Hassel, J., Helistö, P., Kiviranta, M., Seppä, H., Kulawski, M., Riekkinen, T. & Ylilammi, M., 2005, Extended abstracs of 10th international superconductive electronics conference, ISEC 2005. p. O-W.04

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Wafer scale encapsulation of MEMS by direct bonding

Suni, T., Henttinen, K., Dekker, J., Luoto, H., Kulawski, M. & Kattelus, H., 2005, 16th Micromechanics Europe Workshop: Book of abstracts. Göteborg, p. 119-122

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

2004

Wideband microwave power sensor based on MEMS technology

Alastalo, A., Kyynäräinen, J., Seppä, H., Kärkkäinen, A., Pesonen, N., Lahdes, M., Vähä-Heikkilä, T., Pekko, P. & Dekker, J., 2004, 2004 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, p. 115-116

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1994

Metal fluoride thin films prepared by atomic layer deposition

Ranta-aho, T. & Ylilammi, M., 1994, Proceedings of the XXVIII Annual Conference of the Finnish Physical Society. Hyvönen-Dabek, M. (ed.). Järvenpää: Suomen Fyysikkoseura, 12:10. (University of Helsinki: Department of Physics. Report Series in Physics, Vol. 260).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers

Saarilahti, J., Xia, Z., Ronkainen, H., Eränen, S. & Kuivalainen, P., 1994, 16th Nordic Semiconductor Meeting: Abstracts. Gislason, H. P., Gudmundsson, V. & Xander, G. (eds.). Reykjavík: University of Iceland, p. 164

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Test chip and process design for evaluating flip chip technology

Salonen, J. & Salmi, J., 1994, First International Symposium on Flip Chip Technology, held in conjunction with the Sixth International TAB/Advanced Packaging Symposium. Neffs, p. 230-233

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

The computer program Gisa for ion beam analysis

Saarilahti, J., 1994.

Research output: Contribution to conferenceConference articleScientific

1993

Blue emitting fluoride films

Ranta-aho, T. & Ylilammi, M., 1993, Eurodisplay '93: The 13th International Display Research Conference. Saint-Brieuc, p. 507-510

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Electrical properties of Tantalum based composite oxide films

Kattelus, H., Ylilammi, M., Salmi, J., Ranta-Aho, T., Nykänen, E. & Suni, I., 1993, Amorphous Insulating Thin Films: Symposium G. Devine, R. A. B., Kanicki, J., Matsumura, M. & Warren, W. L. (eds.). Pittsburgh: Materials Research Society, p. 511-516 (Materials Research Society Symposia Proceedings, Vol. 284).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

25 Citations (Scopus)

Metal fluoride thin films deposited by atomic layer epitaxy

Ylilammi, M. & Ranta-aho, T., 1993, 9th International Conference on Thin Films, ICTF9: Book of Abstracts. Wien

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

1992

Electric field quenching of photoluminescence in thin-film phosphors

Ranta-aho, T., Ylilammi, M., Kattelus, H. & Härkönen, G., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 167-170

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Electric field quenching of photoluminescence in thin-film phosphors

Ranta-aho, T., Ylilammi, M., Kattelus, H. & Härkönen, G., 1992, Proceedings of the 6th International Workshop on Electroluminescence (EL-92). Singh, V. P. & McClure, J. C. (eds.). El Paso, p. 146-151

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Growth of ZnS by ALE without chloride compounds

Ylilammi, M. & Ranta-aho, T., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 43-46

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Ion beam analysis of superconducting Y1 Ba2 Cu3 O7-x thin films

Saarilahti, J., Salmi, J. & Suni, I., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 227-230

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific