Research Output

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Conference article in proceedings
2020

Monolithic integration of up to 40 GHz Ge photodetectors in 3μm SOI

Vehmas, T., Kapulainen, M., Heimala, P., Delrosso, G., Sun, F., Gao, F. & Aalto, T., 2020, Silicon Photonics XV. Reed, G. T. & Knights, A. P. (eds.). International Society for Optics and Photonics SPIE, 112850V. (Proceedings of SPIE, Vol. 11285).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2019

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J., Sillanpää, T. & Pensala, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2489-2492 4 p. 8925544

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 8760353

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2592-2595 4 p. 8925964

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

SAFTIR - a novel point-of-need diagnostic platform for animal health and food safety

Utriainen, M., Saviranta, P., Aikio, S., Hiltunen, M., Kokkonen, A., Mäyrä, A., Alamäki, M., Vasama, H. & Tappura, K., 1 Jan 2019, Precision Livestock Farming 2019: Papers Presented at the 9th European Conference on Precision Livestock Farming, ECPLF 2019. O'Brien, B., Hennessy, D. & Shalloo, L. (eds.). p. 721-726

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Sensor Technologies in Dairy Farms in Finland

Utriainen, M., Pastell, M., Rinne, M., Kajava, S. & Myllymäki, H., 2019, Precision Livestock Farming 2019: Papers Presented at the 9th European Conference on Precision Livestock Farming, ECPLF 2019. O'Brien, B., Hennessy, D. & Shalloo, L. (eds.). p. 98-104 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Silicon gradient refractive index lens for millimeter wave radiometers

Pursula, P., Lamminen, A., Mannila, R., Tappura, K. & Saarilahti, J., Sep 2019, IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers, 8874541. (International Conference on Infrared, Millimeter, and Terahertz Waves, Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 4 p. 8925660

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
2007

Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

Jansman, A. B. M., Strijbos, R. C., Lobeek, J. W., Vanhelmont, FW. M., Ruigrok, J. J. M., Pensala, T. & Ylilammi, M., 2007, Proceedings: IEEE Ultrasonics Symposium, 2007. p. 1045-1048

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Area and dispersion dependence of vibration shape and coupling coefficient in thin film BAW resonators

Pensala, T., Ylilammi, M., Johanna, M. & Kokkonen, K., 2007, Proceedings : IEEE Ultrasonics Symposium, IUS 2007. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, p. 1661-1664

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)
2005

Fabrication process for milli-Kelvin Josephson junction circuits

Grönberg, L., Hassel, J., Helistö, P., Kiviranta, M., Seppä, H., Kulawski, M., Riekkinen, T. & Ylilammi, M., 2005, Extended abstracs of 10th international superconductive electronics conference, ISEC 2005. p. O-W.04

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

2004

Wideband microwave power sensor based on MEMS technology

Alastalo, A., Kyynäräinen, J., Seppä, H., Kärkkäinen, A., Pesonen, N., Lahdes, M., Vähä-Heikkilä, T., Pekko, P. & Dekker, J., 2004, 2004 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, p. 115-116

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1994

Metal fluoride thin films prepared by atomic layer deposition

Ranta-aho, T. & Ylilammi, M., 1994, Proceedings of the XXVIII Annual Conference of the Finnish Physical Society. Hyvönen-Dabek, M. (ed.). Järvenpää: Suomen Fyysikkoseura, 12:10. (University of Helsinki: Department of Physics. Report Series in Physics, Vol. 260).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Test chip and process design for evaluating flip chip technology

Salonen, J. & Salmi, J., 1994, First International Symposium on Flip Chip Technology, held in conjunction with the Sixth International TAB/Advanced Packaging Symposium. Neffs, p. 230-233

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

1993

Blue emitting fluoride films

Ranta-aho, T. & Ylilammi, M., 1993, Eurodisplay '93: The 13th International Display Research Conference. Saint-Brieuc, p. 507-510

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Electrical properties of Tantalum based composite oxide films

Kattelus, H., Ylilammi, M., Salmi, J., Ranta-Aho, T., Nykänen, E. & Suni, I., 1993, Amorphous Insulating Thin Films: Symposium G. Devine, R. A. B., Kanicki, J., Matsumura, M. & Warren, W. L. (eds.). Pittsburgh: Materials Research Society, p. 511-516 (Materials Research Society Symposia Proceedings, Vol. 284).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

25 Citations (Scopus)
1992

Electric field quenching of photoluminescence in thin-film phosphors

Ranta-aho, T., Ylilammi, M., Kattelus, H. & Härkönen, G., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 167-170

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Electric field quenching of photoluminescence in thin-film phosphors

Ranta-aho, T., Ylilammi, M., Kattelus, H. & Härkönen, G., 1992, Proceedings of the 6th International Workshop on Electroluminescence (EL-92). Singh, V. P. & McClure, J. C. (eds.). El Paso, p. 146-151

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Growth of ZnS by ALE without chloride compounds

Ylilammi, M. & Ranta-aho, T., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 43-46

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Ion beam analysis of superconducting Y1 Ba2 Cu3 O7-x thin films

Saarilahti, J., Salmi, J. & Suni, I., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 227-230

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Optical modeling of thin film electroluminescent devices

Ylilammi, M. & Kattelus, H., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 171-174

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Plasma etching characteristics of sputtered tungsten films

Franssila, S., Molarius, J. & Saarilahti, J., 1992, Advanced Metallization and Processing for Semiconductor Devices and Circuits II: Symposium C. Harper, J. M. E., Katz, A., Murarka, S. P. & Nissim, Y. I. (eds.). Pittsburgh: Materials Research Society, p. 341-346 (Materials Research Society Symposia Proceedings, Vol. 260).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Reactively co-sputtered in situ annealed super-conducting Y1 Ba2 Cu3 O7-x thin films

Salmi, J., Saarilahti, J. & Suni, I., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Espoo: VTT Technical Research Centre of Finland, p. 231-234

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review