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Conference abstract in proceedings
2019

Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access

Dopant Concentration Analysis of ALD Thin Films in 3D Structures by ToF-SIMS

Kia, A. M., Weinreich, W., Utriainen, M., Puurunen, R. L. & Haufe, N., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS, p. 61-61 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access
2005

Wafer scale encapsulation of MEMS by direct bonding

Suni, T., Henttinen, K., Dekker, J., Luoto, H., Kulawski, M. & Kattelus, H., 2005, 16th Micromechanics Europe Workshop: Book of abstracts. Göteborg, p. 119-122

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

1994

RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers

Saarilahti, J., Xia, Z., Ronkainen, H., Eränen, S. & Kuivalainen, P., 1994, 16th Nordic Semiconductor Meeting: Abstracts. Gislason, H. P., Gudmundsson, V. & Xander, G. (eds.). Reykjavík: University of Iceland, p. 164

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

1993

Metal fluoride thin films deposited by atomic layer epitaxy

Ylilammi, M. & Ranta-aho, T., 1993, 9th International Conference on Thin Films, ICTF9: Book of Abstracts. Wien

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific