Research Output

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Conference Abstract
2019

Comparison of milk analysis performance between NIR laboratory analyser and miniaturised NIR MEMS sensors

Uusitalo, S., Aernouts, B., Sumen, J., Hietala, E., Utriainen, M. & Pastell, M., 17 Jun 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Open Access

Depth spectroscopy analysis of La-doped HfO2 ALD thin films in 3D structures by HAXPES and ToF-SIMS

Kia, A. M., Mart, C., Haufe, N., Utriainen, M., Puurunen, R. L. & Weinreich, W., 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

On-farm quality analysis of raw milk: the potential of miniature spectrometers

Aernouts, B., Diaz-Olivares, J., Adriaens, I., Uusitalo, S., Sumen, J., Hietala, E., Utriainen, M., Frondelius, L., Kajava, S. & Pastell, M., Sep 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Physical and Electrical Characterization of ALD Chalcogenide Materials for 3D Memory Applications

Narasimhan, V., Adinolfi, V., Cheng, L., McBriarty, M. E., Utriainen, M., Gao, F., Puurunen, R. L. & Littau, K., 22 Jul 2019, p. 62-62. 1 p.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Radical Surface Recombination Probabilities during Plasma ALD of SiO2, TiO2 and Al2O3 Determined from Film Conformality

Arts, K., Utriainen, M., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 23 Jul 2019, p. 105-106. 1 p.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3

Utriainen, M., Arts, K., Vandalon, V., Gao, F., Puurunen, R. L., Kessels, E. & Knoops, H., 22 Jan 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Stresses in ALD films: aiming for zero stress thin films

Ritasalo, R., Ylivaara, O. M. E., Pilvi, T., Suni, T. & Veselov, A., 14 May 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review