Research Output

Filter
Conference Poster
2019

Al2O3 thin films prepared by a modified H2O-based PEALD for encapsulation applications

Zhu, Z., Merdes, S., Mizohata, K., Ylivaara, O. M. E., Heikkilä, M. J. & Salmi, E., 25 Jun 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Conformality analysis of the archetype aluminium oxide ALD process in 3rd-generation silicon-based lateral high-aspect-ratio test structures

Ylivaara, O. M. E., Yim, J., Ylilammi, M., Utriainen, M. & Puurunen, R. L., 27 Jun 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review