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2020

Al2O3 Thin Films Prepared by a Combined Thermal-Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

Zhu, Z., Merdes, S., Ylivaara, O. M. E., Mizohata, K., Heikkilä, M. J. & Savin, H., 1 Apr 2020, In : Physica Status Solidi A: Applications and Materials Science. 217, 8, 1900237.

Research output: Contribution to journalArticleScientificpeer-review

High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

Pitanti, A., Makkonen, T., Colombano, M. F., Zanotto, S., Vicarelli, L., Cecchini, M., Griol, A., Navarro-Urrios, D., Sotomayor-Torres, C., Martinez, A. & Ahopelto, J., 17 Jul 2020, In : Physical Review Applied. 14, 1, 014054.

Research output: Contribution to journalArticleScientificpeer-review

Multiplexed mycotoxins determination employing white light reflectance spectroscopy and silicon chips with silicon oxide areas of different thickness

Anastasiadis, V., Koukouvinos, G., Petrou, P. S., Economou, A., Dekker, J., Harjanne, M., Heimala, P., Goustouridis, D., Raptis, I. & Kakabakos, S. E., 1 Apr 2020, In : Biosensors and Bioelectronics. 153, 112035.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
2019

Conversion between surface acoustic waves and guided modes of a quasi-periodic structured nanobeam

Korovin, A. V., Pennec, Y., Stocchi, M., Mencarelli, D., Pierantoni, L., Makkonen, T., Ahopelto, J. & Djafari Rouhani, B., 6 Jun 2019, In : Journal of Physics D: Applied Physics. 52, 32, 32LT01.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2

Arts, K., Utriainen, M., Puurunen, R. L., Kessels, W. M. M. & Knoops, H. C. M., 7 Nov 2019, In : Journal of Physical Chemistry C. 123, 44, p. 27030-27035 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
6 Citations (Scopus)

Intercalation of Lithium Ions from Gaseous Precursors into β-MnO 2 Thin Films Deposited by Atomic Layer Deposition

Nieminen, H-E., Miikkulainen, V., Settipani, D., Simonelli, L., Hönicke, P., Zech, C., Kayser, Y., Beckhoff, B., Honkanen, A-P., Heikkilä, M. J., Mizohata, K., Meinander, K., Ylivaara, O. M. E., Huotari, S. & Ritala, M., 27 Jun 2019, In : Journal of Physical Chemistry C. 123, 25, p. 15802-15814 13 p.

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide

Zhu, Z., Sippola, P., Ylivaara, O., Modanese, C., Di Sabatino, M., Mizohata, K., Merdes, S., Lipsanen, H. & Savin, H., 2019, In : Nanoscale Research Letters. 14, 8 p., 55.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
1 Citation (Scopus)

Microelectrode Array With Transparent ALD TiN Electrodes

Ryynänen, T., Pelkonen, A., Grigoras, K., Ylivaara, O. M. E., Hyvärinen, T., Ahopelto, J., Prunnila, M., Narkilahti, S. & Lekkala, J., 22 Mar 2019, In : Frontiers in Neuroscience. 13, 226.

Research output: Contribution to journalArticleScientificpeer-review

Open Access

New pressure sensing elements for FFR coronary catheter

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Sensorit tulevat maitotiloille

Utriainen, M., 2019, In : Nauta. 2019, 3, p. 36-39 4 p.

Research output: Contribution to journalArticleProfessional

Open Access

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Erwin Kessels, W. M. M. & Knoops, H. C. M., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 37, 3, 030908.

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

ToF-SIMS 3d analysis of thin films deposited in high aspect ratio structures via atomic layer deposition and chemical vapor deposition

Kia, A. M., Haufe, N., Esmaeili, S., Mart, C., Utriainen, M., Puurunen, R. L. & Weinreich, W., Jul 2019, In : Nanomaterials. 9, 7, 1035.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
6 Citations (Scopus)