Research Output per year
Fingerprint Dive into the research topics where BA192 Microelectronics processes and operations is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
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Profiles
Elena Peltonen
- BA192B Process engineering - Process Engineer
Person: Senior Research Engineers, Research Engineers
Fang Tuurnala
- BA192 Microelectronics processes and operations - Head of Fab Operations
Person: Managers, Key Account Managers
Research Output
Calibration of cryogenic amplification chains using normal-metal-insulator-superconductor junctions
Hyyppä, E., Jenei, M., Masuda, S., Sevriuk, V., Tan, K. Y., Silveri, M., Goetz, J., Partanen, M., Lake, R. E., Grönberg, L. & Möttönen, M., 17 May 2019, In : Applied Physics Letters. 114, 19, 192603.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access
2
Citations
(Scopus)
Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level
Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2592-2595 4 p. 8925964Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
1
Citation
(Scopus)
Status of the process to produce large area double-sided silicon detectors
Eränen, S., Häkkinen, T., Leinonen, K., Hietanen, I., Rönnqvist, C., Schulman, T., Tuuva, T. & Voutilainen, M., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 247-250Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific