BA192 Microelectronics processes and operations

Fingerprint Dive into the research topics where BA192 Microelectronics processes and operations is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

  • Network Recent external collaboration on country level. Dive into details by clicking on the dots.

    Profiles

    No photo of Elena Peltonen

    Elena Peltonen

    Person: Senior Research Engineers, Research Engineers

    No photo of Heini Saloniemi

    Heini Saloniemi

    Person: Managers, Key Account Managers

    20002013
    No photo of Fang Tuurnala

    Fang Tuurnala

    Person: Managers, Key Account Managers

    Research Output

    • 2 Conference article in proceedings
    • 1 Article

    Calibration of cryogenic amplification chains using normal-metal-insulator-superconductor junctions

    Hyyppä, E., Jenei, M., Masuda, S., Sevriuk, V., Tan, K. Y., Silveri, M., Goetz, J., Partanen, M., Lake, R. E., Grönberg, L. & Möttönen, M., 17 May 2019, In : Applied Physics Letters. 114, 19, 192603.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
  • 2 Citations (Scopus)

    Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

    Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2592-2595 4 p. 8925964

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)

    Status of the process to produce large area double-sided silicon detectors

    Eränen, S., Häkkinen, T., Leinonen, K., Hietanen, I., Rönnqvist, C., Schulman, T., Tuuva, T. & Voutilainen, M., 1992, Proceedings of the 15th Nordic Semiconductor Meeting. Franssila, S. & Paananen, R. (eds.). Espoo: VTT Technical Research Centre of Finland, p. 247-250

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific