Fingerprint Dive into the research topics where BA192B Process engineering is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.

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    No photo of Elena Peltonen

    Elena Peltonen

    Person: Senior Research Engineers, Research Engineers

    No photo of Heini Saloniemi

    Heini Saloniemi

    Person: Managers, Key Account Managers

    No photo of Tytti K. Virtanen

    Tytti K. Virtanen

    Person: Research Trainees


    Research Output

    • 1 Conference article in proceedings

    Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

    Mertin, S., Nyffeler, C., Makkonen, T., Heinz, B., Mazzalai, A., Schmitz-Kempen, T., Tiedke, S., Pensala, T. & Muralt, P., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 2592-2595 4 p. 8925964

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)