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devices
100%
silicon
94%
applications
73%
layers
72%
ghz range
61%
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58%
sensors
57%
waveguides
49%
performance
47%
noise
46%
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42%
surfaces
39%
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38%
antennas
38%
losses
37%
resonators
37%
range
37%
thin films
35%
films
35%
amplifiers
32%
qubits
32%
readout systems
32%
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31%
data
30%
microwave radiation
30%
cryogenics
29%
fabrication
29%
patents
28%
levels
26%
operation
26%
simulation
26%
voltage
25%
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24%
wavelengths
24%
semiconductor materials
23%
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22%
gain
22%
hybrids
22%
energy
22%
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21%
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21%
output
20%
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20%
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20%
transducers
20%
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20%
detection
20%
comparative evaluations
19%
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19%
dynamics
19%
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19%
mirrors
19%
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18%
cellulose
18%
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18%
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17%
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17%
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17%
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17%
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16%
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16%
germanium silicides
16%
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16%
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16%
filters
15%
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15%
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15%
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15%
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15%
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15%
fabry-perot interferometer
15%
inventions
15%
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15%
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14%
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14%
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13%
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13%
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13%
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13%
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13%
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13%
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13%
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13%
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13%
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12%
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12%
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12%
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12%
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12%
ferroelectric materials
12%
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12%
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12%
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12%
low temperature
12%
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12%
apparatus
12%
refrigerators
11%
field effect transistors
11%
optical fibers
11%
cameras
11%
Keyphrases
Patent Family
35%
Waveguide
15%
Fabry-Perot Interferometer
14%
Photonic Integrated Circuits
12%
Resonator
12%
Antenna
10%
Silicon-on-insulator
10%