Projects per year
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Dive into the research topics where BA6201 MEMS is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
Network
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
Profiles
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Med-IPUT: MEDical Integrated Photonic Ultrasound Transducers
Marin Vasquez, Y., Heimala, P., Sun, F., Ylinen, S., Eskelinen, P., Ailas, H., Lee, J. & Harjanne, M.
1/01/23 → 30/06/26
Project: EU project
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Graphene Based Dry Electrodes for Biometric Measurements
Ruotsalainen, T., Mattila, T., Jaakkola, H., Reho, A., Soikkeli, M. & Helistö, P.
3/01/22 → 30/06/23
Project: Business Finland project
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Beetles: BEOL ecosystem for Telecommunication and Sensors
Salo, T., Dekker, J. R., Ailas, H., Pensala, T., Khan, W., Pohjonen, H., Arpiainen, S., Pehto, E., Eskelinen, P., Soikkeli, M., Rantakari, P., Saijets, J., Pusa, J., Järvi, K. & Marles, J.
1/06/21 → 31/05/24
Project: Business Finland project
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Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror
Oldham, K. R., Ylivaara, O., Morits, D. & Kyynarainen, J., 9 Mar 2023, (E-pub ahead of print) In: Journal of Microelectromechanical Systems. p. 1-8 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
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Supercooling of the A phase of 3He
Tian, Y., Lotnyk, D., Eyal, A., Zhang, K., Zhelev, N., Abhilash, T. S., Chavez, A., Smith, E. N., Hindmarsh, M., Saunders, J., Mueller, E. & Parpia, J. M., 10 Jan 2023, In: Nature Communications. 14, 1, 9 p., 148.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access -
Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications
Pernu, T., Saarilahti, J., Kyynarainen, J. & Sillanpaa, T., 1 Feb 2023, In: Journal of Microelectromechanical Systems. 32, 1, p. 74-81 8 p.Research output: Contribution to journal › Article › Scientific › peer-review
1 Citation (Scopus)