INIS
performance
100%
devices
86%
silicon
83%
bolometers
80%
sensitivity
80%
power
69%
mirrors
67%
thin films
64%
wavelengths
60%
layers
59%
sensors
52%
metals
48%
transducers
46%
voltage
45%
field effect transistors
38%
membranes
38%
aluminium nitrides
35%
detection
34%
readout systems
33%
semiconductor materials
33%
efficiency
32%
operation
32%
coupling
32%
design
31%
nonlinear problems
31%
conversion
31%
transistors
30%
oxides
29%
failures
29%
signals
29%
information
29%
cost
29%
beams
29%
fabrication
28%
amplitudes
27%
actuators
26%
interferometers
26%
incidents
26%
titanium oxides
26%
graphene
26%
deposition
26%
aluminium oxides
26%
dynamics
26%
coatings
26%
ultrasonics
26%
gas flow
26%
mos transistors
26%
applications
26%
range
26%
photodetectors
23%
thickness
21%
cooling
20%
speed
20%
excitation
17%
resonance
17%
thermal mass
16%
substrates
15%
processing
15%
ghz range
15%
frequency range
15%
cavities
14%
piezoelectricity
13%
grids
13%
energy
13%
sound waves
13%
simulation
13%
scattering
13%
phonons
13%
thermal conductivity
13%
scaling
13%
gases
13%
surfaces
11%
films
11%
levels
10%
losses
10%
charge carriers
10%
penetration depth
10%
bioassay
10%
comparative evaluations
10%
statistics
10%
reliability
10%
Keyphrases
Thermoelectric
80%
Bolometer
62%
High Sensitivity
59%
Infrared Sensing
53%
Infrared Bolometers
37%
Nitrides
35%
Nanobeam
35%
Infrared Imaging
33%
High Performance
33%
Transistor
32%
Complementary Metal Oxide Semiconductor
30%
Atomic Layer Deposited
26%
Fabry
26%
Thermomechanical Properties
26%
Interferometer
26%
TiO2 Thin Film
26%
Optical Power
26%
Aluminum Oxide Film
26%
Predictable Quantum Efficient Detector
26%
Micro-opto-electro-mechanical Systems (MOEMS)
26%
Large Angle
26%
Order of Magnitude
26%
Failure Prevention
26%
Magnitude Change
26%
Atomic Layer Deposition
26%
Static Charge
26%
Nanocrystalline Silicon
26%
Rutile
26%
Sticking
26%
Circular Scanning
26%
Micromirror
26%
Nonlinear Dynamics
26%
Silicon Nanobeam
26%
Anti-stiction
26%
Field-effect Transistor Biosensor
26%
Biosensor Array
26%
Thin-film Actuators
26%
Uncooled Infrared
26%
Graphene Field-effect Transistor
26%
Uncooled
26%
Resonant Micromirror
26%
AIN Thin Films
26%
In-situ Graphene
26%
Silicon-based
26%
Actuator
26%
Real-time Frequency
26%
Gas Flow Sensor
26%
Optomechanics
26%
Electromechanical Coupling
26%
Memory Integration
26%
Frequency Matching
26%
Capacitive Micromachined Ultrasonic Transducer
26%
Silicon Membrane
26%
Matching Circuit
26%
Resistive Random Access Memory (ReRAM)
26%
Nanomembrane
23%
Aluminum Oxide
22%
Device Performance
21%
Absorber
20%
Biosensing
20%
Carrier Loss
17%
Penetration Depth
17%
Charge Carriers
17%
Thermal Processing
17%
Feedback Device
17%
Piezoelectric Actuator
17%
Beam Structure
17%
Long-wave Infrared
16%
Infrared Photodetector
16%
Nonlinearity
15%
Aluminum Nitride Thin Film
15%
Integrated Sensing
15%
GHz Range
15%
Information Technology
15%
Bias Voltage
14%
Metal Mirror
13%
Atomic Layer Deposition Al2O3
13%
Mirror Response
13%
Thick Layer
13%
TiO2 Layer
13%
Intrinsic Stress
13%
TiO2 Coating
13%
Non-reversible
13%
Residual Stress
13%
Multi-analyte Detection
13%
Mechanical Energy Flow
13%
Gate Metal
13%
Electrical Signal
13%
Low Power
13%
Conversion Efficiency
13%
Resistive Bolometer
12%
Thermal Detector
12%
Thermal Mass
12%
Exotic Material
12%
Specific Detectivity
11%
Mid-wavelength
11%
Chemical Analysis
10%
Photodetector
10%
Resonant Frequency
10%
Field-effect Transistors
10%
Engineering
Thermoelectricity
80%
Transducer
57%
Thin Films
45%
Nitride
40%
Bias Voltage
32%
Micromirrors
26%
Non-Linear Dynamics
26%
Complementary Metal-Oxide-Semiconductor
26%
Micro-Opto-Electromechanical System
26%
Stiction
26%
Static Charge
26%
Atomic Layer
26%
FET Biosensor
26%
Graphene
26%
Penetration Depth
26%
Optical Power
26%
Charge Carrier
26%
Electrical Signal
26%
Conversion Efficiency
26%
Energy Flow
26%
Mechanical Energy
26%
Flow Sensor
26%
Ultrasonics
26%
Gas Flow
26%
Matching Circuit
26%
Capacitive
26%
Actuator
26%
Biosensing
21%
Full Scale
21%
Nonlinearity
20%
Photometer
19%
Field-Effect Transistor
16%
Beam Structure
13%
Feedback Signal
13%
Piezoelectric Actuator
13%
Model Parameter
13%
Good Agreement
13%
Mirror Design
13%
Relative Strength
13%
Dynamic Response
13%
Thick Layer
13%
Thin Layer
13%
Titanium Dioxide (Tio2)
13%
Depletion Region
13%
Negative Slope
13%
Logarithmic Scale
13%
Photocurrent
13%
Power Level
13%
Photodiode
13%
Nanoscale
13%
Surface Acoustic Wave
13%
Electrical Power
13%
Information Technology
13%
Device Performance
12%
Responsivity
12%
Nanomaterial
10%
Resonance Frequency
10%