Research output per year
Research output per year
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Dive into the research topics where BA6212 Optical microsystems is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
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Profiles
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Jouni Ahopelto
- BA6212 Optical microsystems - Research Professor
Person: Research Professors, Senior Advisors
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Resonant micromirror with symmetrical AIN thin film actuators: Invited paper
Ruotsalainen, K., Morits, D., Ylivaara, O. M. E. & Kyynäräinen, J., 3 Oct 2022, Laser Beam Shaping XXII. Dudley, A. & Laskin, A. V. (eds.). International Society for Optics and Photonics SPIE, p. 8 122180B. (Proceedings of SPIE, Vol. 12218).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
Ylivaara, O. M. E., Langner, A., Ek, S., Malm, J., Julin, J., Laitinen, M., Ali, S., Sintonen, S., Lipsanen, H., Sajavaara, T. & Puurunen, R. L., 1 Dec 2022, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 40, 6, 062414.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access