Keyphrases
Bolometer
80%
Thermoelectric
80%
Infrared Sensing
80%
Nitrides
53%
Infrared Imaging
50%
High Performance
50%
Atomic Layer Deposited
40%
Fabry
40%
Thermomechanical Properties
40%
Interferometer
40%
TiO2 Thin Film
40%
Optical Power
40%
Aluminum Oxide Film
40%
Predictable Quantum Efficient Detector
40%
Micro-opto-electro-mechanical Systems (MOEMS)
40%
Large Angle
40%
Order of Magnitude
40%
Failure Prevention
40%
Magnitude Change
40%
Atomic Layer Deposition
40%
Static Charge
40%
Nanocrystalline Silicon
40%
Rutile
40%
Sticking
40%
Circular Scanning
40%
Micromirror
40%
Nonlinear Dynamics
40%
Silicon Nanobeam
40%
Anti-stiction
40%
Field-effect Transistor Biosensor
40%
Complementary Metal Oxide Semiconductor
40%
Biosensor Array
40%
Thin-film Actuators
40%
Uncooled Infrared
40%
Graphene Field-effect Transistor
40%
Uncooled
40%
Resonant Micromirror
40%
AIN Thin Films
40%
In-situ Graphene
40%
Silicon-based
40%
Actuator
40%
High Sensitivity
36%
Aluminum Oxide
33%
Absorber
30%
Biosensing
30%
Nanomembrane
27%
Carrier Loss
26%
Penetration Depth
26%
Charge Carriers
26%
Thermal Processing
26%
Feedback Device
26%
Piezoelectric Actuator
26%
Beam Structure
26%
Nonlinearity
23%
Aluminum Nitride Thin Film
23%
Integrated Sensing
23%
Metal Mirror
20%
Atomic Layer Deposition Al2O3
20%
Mirror Response
20%
Thick Layer
20%
TiO2 Layer
20%
Intrinsic Stress
20%
TiO2 Coating
20%
Non-reversible
20%
Residual Stress
20%
Multi-analyte Detection
20%
Device Performance
20%
Resistive Bolometer
18%
Thermal Detector
18%
Thermal Mass
18%
Long-wave Infrared
18%
Exotic Material
18%
Infrared Photodetector
18%
Infrared Bolometers
16%
Chemical Analysis
16%
Photodetector
16%
Low Bias Voltage
13%
Slope Region
13%
Logarithmic Scale
13%
Gigahertz Frequency
13%
GHz Range
13%
Depletion Region
13%
Entrance Window
13%
Coefficient of Thermal Expansion
13%
Photocurrent
13%
Information Technology
13%
Photodiode
13%
Voltage Dependence
13%
Efficient Power
13%
Scalable Technology
13%
Nanobeam
13%
Negative Slope
13%
Growth Temperature
13%
Visible-infrared
13%
Optical Properties
13%
Wavelength Range
13%
Bias Voltage
13%
Near-infrared Spectrum
13%
Power Level
13%
Low-power Devices
13%
INIS
mirrors
100%
performance
99%
thin films
89%
devices
84%
layers
80%
silicon
80%
bolometers
80%
power
63%
wavelengths
60%
aluminium nitrides
53%
readout systems
50%
metals
50%
nonlinear problems
46%
semiconductor materials
45%
failures
43%
voltage
42%
detection
42%
amplitudes
41%
actuators
40%
interferometers
40%
incidents
40%
titanium oxides
40%
graphene
40%
deposition
40%
aluminium oxides
40%
dynamics
40%
field effect transistors
40%
oxides
40%
coatings
40%
sensitivity
40%
operation
38%
design
37%
applications
33%
cooling
30%
sensors
28%
thermal mass
25%
photodetectors
25%
signals
23%
range
23%
thickness
21%
fabrication
21%
piezoelectricity
20%
grids
20%
cost
20%
efficiency
18%
films
16%
losses
16%
charge carriers
16%
penetration depth
16%
bioassay
16%
comparative evaluations
16%
statistics
16%
reliability
16%
processing
14%
control systems
13%
information
13%
control
13%
ghz range
13%
beams
13%
lasers
13%
feedback
13%
frequency range
13%
nanomaterials
13%
gases
13%
levels
11%
charges
11%
cavities
11%
residual stresses
10%
integrated circuits
10%
scattering
10%
phonons
10%
optimization
10%
noise
10%
thermal conductivity
10%
speed
10%
membranes
10%
figure of merit
10%
geometry
10%
chemical analysis
10%
impedance
10%
Engineering
Nitride
80%
Thermoelectricity
80%
Thin Films
60%
Micromirrors
40%
Non-Linear Dynamics
40%
Complementary Metal-Oxide-Semiconductor
40%
Micro-Opto-Electromechanical System
40%
Stiction
40%
Static Charge
40%
Atomic Layer
40%
FET Biosensor
40%
Graphene
40%
Beam Structure
40%
Feedback Signal
40%
Penetration Depth
40%
Bias Voltage
40%
Optical Power
40%
Nonlinearity
40%
Piezoelectric Actuator
40%
Charge Carrier
40%
Biosensing
32%
Field-Effect Transistor
24%
Photometer
22%
Model Parameter
20%
Good Agreement
20%
Mirror Design
20%
Relative Strength
20%
Dynamic Response
20%
Thick Layer
20%
Thin Layer
20%
Titanium Dioxide (Tio2)
20%
Depletion Region
20%
Negative Slope
20%
Logarithmic Scale
20%
Photocurrent
20%
Power Level
20%
Sensing Element
20%
Operation Mode
20%
Digital Domain
20%
Actuation
20%
Piezoelectric Element
20%
Control Systems
20%
Q Factor
20%
Operation Phase
20%
Phase Ratio
20%
Photodiode
20%
Digital Control System
20%
Digital Control
20%
Nanomaterial
16%
Resistive
14%
Device Performance
13%