Research output per year
Research output per year
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2022
Resonant micromirror with symmetrical AIN thin film actuators: Invited paper
Ruotsalainen, K., Morits, D., Ylivaara, O. M. E. & Kyynäräinen, J., 3 Oct 2022, Laser Beam Shaping XXII. Dudley, A. & Laskin, A. V. (eds.). International Society for Optics and Photonics SPIE, p. 8 122180B. (Proceedings of SPIE, Vol. 12218).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review