Keyphrases
Uncertainty Evaluation
100%
Scatterometry
89%
Network-assisted
71%
Quality Control
71%
Grating
71%
Artificial Neural Network
71%
Nanostructured Surfaces
71%
Optical Metrology
71%
Measurement Techniques
71%
Thin Film Surfaces
71%
Optical Measurement Method
53%
Reflectometry
53%
Diffraction Efficiency
42%
Scatterometer
42%
Optical Scatterometry
35%
Traceable Measurement
35%
Extreme Ultraviolet
35%
Extinction Coefficient
35%
Index Coefficients
35%
Refractive Index
35%
Scanning Electron Microscope
28%
Diffractive Optics
28%
Measurand
28%
Ru Films
17%
IR Spectral Range
17%
Measurement Uncertainty Evaluation
17%
Layered Nanostructure
17%
Silicon Nanostructures
17%
Mueller Matrix Ellipsometry
17%
Metal Film Thickness
17%
Inverse Problem Solving
17%
Nanostructure Geometry
17%
Silica Nanostructures
17%
Optical Constants
17%
Layer Thickness
17%
Spectral Range
17%
Optical Properties
17%
X-ray Reflectivity
17%
Impurities
17%
Advanced Metrology
17%
Comprehensive Characterization
17%
Metrology
17%
Relative Standard Uncertainty
17%
Uncertainty Budget
17%
Roughness Value
17%
National Metrology Institute
17%
Geometric Imperfection
17%
Thin Metal Films
17%
Two Dimensional
17%
Fused Silica
17%
INIS
evaluation
100%
values
85%
quality control
71%
neural networks
71%
gratings
71%
height
71%
metrology
71%
thin films
71%
surfaces
71%
nanostructures
71%
range
57%
efficiency
42%
diffraction
42%
thickness
42%
scanning electron microscopy
28%
line widths
28%
pitches
28%
refractive index
28%
x radiation
28%
films
28%
extreme ultraviolet radiation
28%
geometry
28%
ellipsometry
28%
validation
14%
learning
14%
machine learning
14%
imperfections
14%
guidelines
14%
layers
14%
silicon
14%
wavelengths
14%
one-dimensional calculations
14%
budgets
14%
information
14%
communities
14%
optical properties
14%
width
14%
metals
14%
impurities
14%
silica
14%
roughness
14%
Engineering
Quality Control
71%
Artificial Neural Network
71%
Nanostructured Surface
71%
Thin Films
71%
Nanomaterial
71%
Film Surface
71%
Scatterometer
42%
Extinction Coefficient
35%
Spectral Range
35%
Refractive Index
35%
Refractivity
35%
Line Width
32%
Measurand
28%
Optical Element
28%
Scanning Electron Microscope
28%
Nanometrology
17%
Experimental Result
17%
Layer Thickness
17%
Two Dimensional
17%
Fused Silica
17%
Measurement Uncertainty
17%
One Dimensional
17%
Performed Measurement
14%
Measurement Value
14%
Reference Sample
14%
Transfer Learning
14%
Learning System
14%
