Aleksi Mattila

Research activity per year

2025
Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology
Hansen, P. E., Siaudinyte, L., Heidenreich, S., Soltwisch, V., Lokhorst, H. W., Tiwari, A., Makhotkin, I., Mattila, A., Lassila, A., Glabisch, S., Schröder, S., Brose, S., Nolot, E., Siefke, T., Asar, M., Memis, S., Yíldíz, F., Schiek, M. & Rømer, A. T., 14 Mar 2025, In: Metrologia. 62, 2, 025010.
Research output: Contribution to journal › Article › Scientific › peer-review
1 Citation (Scopus)
2024
Artificial neural network assisted spectral scatterometry for grating quality control
Mattila, A., Nysten, J., Heikkinen, V., Kilpi, J., Korpelainen, V., Hansen, P.-E., Karvinen, P., Kuittinen, M. & Lassila, A., 31 May 2024, In: Measurement Science and Technology. 35, 8, 085025.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
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2 Citations (Scopus)

43 Downloads (Pure)

Research output