INIS
calibration
100%
comparative evaluations
77%
interferometers
69%
lasers
58%
length
46%
metrology
44%
accuracy
34%
atomic force microscopy
33%
range
31%
errors
28%
interferometry
24%
laboratories
23%
height
23%
surfaces
21%
air
20%
dynamics
19%
gratings
19%
values
18%
levels
18%
design
16%
sensors
16%
pitches
15%
corrections
15%
harmonics
14%
refractive index
14%
fibers
14%
devices
13%
interference
13%
coordinates
13%
size
12%
microscopes
12%
scanning electron microscopy
12%
nonlinear problems
11%
iodine
11%
probes
11%
distance
11%
afm
10%
traps
10%
apertures
10%
performance
10%
stability
10%
applications
10%
silicon
10%
Keyphrases
MIKES
48%
Interferometer
43%
Gauge Block
35%
Metrology
33%
Atomic Force Microscope
28%
EURAMET
28%
Interferometric
24%
Transfer Standard
21%
Uncertainty Estimation
20%
National Metrology Institute
18%
Step Gauge
17%
Laser Interferometer
17%
Grating
16%
Autocollimator
15%
Scanning White Light Interferometer
15%
Line Scale
14%
Measuring Instrument
14%
Repeatability
13%
Nonlinearity
12%
Step Height Standard
11%
Measurement Uncertainty
11%
Air Refractive Index
11%
Interferometry
10%
Length Standard
10%
Iodine
10%
Third Harmonic
10%
Trap Detector
10%
Length Measurement
10%
Engineering
Atomic Force Microscope
37%
Final Report
32%
Traceability
30%
Laser Interferometer
25%
Interferometry
23%
Refractive Index
19%
Refractivity
19%
Repeatability
18%
Light Source
14%
Good Agreement
14%
Nonlinearity
13%
Harmonics
12%
Collimator
12%
Reference Value
10%
Laser Beams
10%