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Antti Tolkki

20042005
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Fingerprint Dive into the research topics where Antti Tolkki is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 12 Similar Profiles
wafers Physics & Astronomy
Ion beams Engineering & Materials Science
implantation Physics & Astronomy
lithography Physics & Astronomy
ion beams Physics & Astronomy
Hydrogen Engineering & Materials Science
silicon Physics & Astronomy
hydrogen Physics & Astronomy

Research Output 2004 2005

  • 1 Conference article in proceedings
  • 1 Article
5 Citations (Scopus)

Flexible stamp for nanoimprint lithography

Nielsen, T., Pedersen, R. H., Hansen, O., Haatainen, T., Tolkki, A., Ahopelto, J. & Kristensen, A., 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. Institute of Electrical and Electronic Engineers IEEE, p. 508-511

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

lithography
membranes
wafers
polymers
silicon
4 Citations (Scopus)

Ion beam studies of hydrogen implanted Si wafers

Nurmela, A., Henttinen, K., Suni, Tolkki, A. & Suni, I., 2004, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 219, p. 747 - 750 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Ion beams
implantation
ion beams
wafers
Hydrogen