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Antti Tolkki

20022005
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Fingerprint Dive into the research topics where Antti Tolkki is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Physics & Astronomy

General

wafers
implantation
membranes
pressing
insulators
ion implantation
cracks

Engineering

lithography
machining
standard deviation
fabrication
backscattering

Physics

ion beams
hydrogen ions
ions

Chemistry and Materials

silicon
hydrogen
boron
polymers
stiffness

Engineering & Materials Science

Ion beams
Hydrogen
Boron
Ion implantation
Silicon
Ions
Rutherford backscattering spectroscopy
Silicon wafers
Single crystals
Annealing
Cracks
Temperature