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Antti Tolkki

20022005
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Research Output 2002 2005

  • 2 Conference article in proceedings
  • 1 Article
2005
5 Citations (Scopus)

Flexible stamp for nanoimprint lithography

Nielsen, T., Pedersen, R. H., Hansen, O., Haatainen, T., Tolkki, A., Ahopelto, J. & Kristensen, A., 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. IEEE Institute of Electrical and Electronic Engineers , p. 508-511

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

lithography
membranes
wafers
polymers
silicon
2004
4 Citations (Scopus)

Ion beam studies of hydrogen implanted Si wafers

Nurmela, A., Henttinen, K., Suni, Tolkki, A. & Suni, I., 2004, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 219, p. 747 - 750 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Ion beams
implantation
ion beams
wafers
Hydrogen
2002

A batch process for depositing amorphous metallic Mo-Si-N films

Kattelus, H., Heikkinen, H., Häärä, A., Ylönen, M. & Tolkki, A., 2002, Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London, UK: IOM Communications Ltd., p. 125-128

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review