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Antti Tolkki

20022005
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Research Output 2002 2005

  • 2 Conference article in proceedings
  • 1 Article
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Article
2004
4 Citations (Scopus)

Ion beam studies of hydrogen implanted Si wafers

Nurmela, A., Henttinen, K., Suni, Tolkki, A. & Suni, I., 2004, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 219, p. 747 - 750 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Ion beams
implantation
ion beams
wafers
Hydrogen