Ari Häärä

20032012
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  • 12 Similar Profiles
Silicon Chemical Compounds
stiction Physics & Astronomy
Stiction Engineering & Materials Science
silicon Physics & Astronomy
Atomic layer deposition Engineering & Materials Science
microelectromechanical systems Physics & Astronomy
atomic layer epitaxy Physics & Astronomy
vacuum Physics & Astronomy

Research Output 2003 2012

9 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleScientificpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems
4 Citations (Scopus)

Electrical and mechanical properties of micromachined vacuum cavities

Kiihamäki, J., Ronkainen, H., Häärä, A. & Mattila, T., 2004, In : Physica Scripta. T114, p. 195 - 198 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Electrical Properties
Silicon-on-insulator
Mechanical Properties
Vacuum
Cavity
37 Citations (Scopus)

Long-term stability of single-crystal silicon microresonators

Koskenvuori, M., Mattila, T., Häärä, A., Kiihamäki, J., Tittonen, I., Oja, A. & Seppä, H., 2004, In : Sensors and Actuators A: Physical. 115, 1, p. 23 - 27 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicon
Single crystals
single crystals
silicon
humidity
2 Citations (Scopus)

A batch process to deposit amorphous metallic Mo-Si-N films

Kattelus, H., Heikkinen, H., Häärä, A., Ylönen, M. & Tolkki, 2003, In : Journal of Materials Science: Materials in Electronics. 14, 5-7, p. 427-430 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Deposits
deposits
Molybdenum
Silicon
molybdenum