Research output per year
Research output per year
Personal profile
Education/Academic qualification
Engineering, Doctorate, Aalto University, School of Electrical Engineering
14 Dec 2015 → 31 Aug 2020
Award Date: 28 Jan 2021
Skills and expertise
- X-ray Diffration (XRD)
- Scanning Electron Microscopy (SEM)
- Atomic layer deposition
- Atomic force microscopy (AFM)
- Physical Vapor Deposition (PVD)
- Chemical Vapor Deposition (CVD)
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Dive into the research topics where Elmeri Österlund is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls
Österlund, E., Seppänen, H., Bespalova, K., Miikkulainen, V. & Paulasto-Kröckel, M., 8 Mar 2021, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 39, 3, 032403.Research output: Contribution to journal › Article › Scientific › peer-review
29 Link opens in a new tab Citations (Scopus) -
Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication
Bespalova, K., Österlund, E., Ross, G., Paulasto-Kröckel, M., Thanniyil Sebastian, A., Karuthedath, C., Mertin, S. & Pensala, T., 16 Mar 2021, In: Journal of Microelectromechanical Systems. 30, 2, p. 290-298Research output: Contribution to journal › Article › Scientific › peer-review
Open Access21 Link opens in a new tab Citations (Scopus) -
Stability and residual stresses of sputtered wurtzite AlScN thin films
Österlund, E., Ross, G., Caro, M. A., Paulasto-Kröckel, M., Hollmann, A., Klaus, M., Meixner, M., Genzel, C., Koppinen, P., Pensala, T., Žukauskaitė, A. & Trebala, M., Mar 2021, In: Physical Review Materials. 5, 3, 035001.Research output: Contribution to journal › Article › Scientific › peer-review
Open Access43 Link opens in a new tab Citations (Scopus) -
Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces
Österlund, E., Suihkonen, S., Ross, G., Torkkeli, A., Kuisma, H. & Paulasto-Kröckel, M., 1 Feb 2020, In: Journal of Crystal Growth. 531, 125345.Research output: Contribution to journal › Article › Scientific › peer-review
13 Link opens in a new tab Citations (Scopus) -
Piezoelectric thin film materials for microelectromechanical systems
Vogl, A., Tyholdt, F., Muralt, P. & Österlund, E., 2020, Handbook of silicon based MEMS materials and technologies. 3 ed. Elsevier, p. 174-186Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific