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Feng Gao

20132019
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  • 40 Similar Profiles
Atomic layer deposition Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
Aspect ratio Engineering & Materials Science
high aspect ratio Physics & Astronomy
Silicon Engineering & Materials Science
Catheters Engineering & Materials Science
Pressure sensors Engineering & Materials Science
Thin films Engineering & Materials Science

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Research Output 2013 2019

New pressure sensing elements for FFR coronary catheter

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Catheters
Pressure sensors
Pressure
Micro-Electrical-Mechanical Systems
Wire

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3

Utriainen, M., Arts, K., Vandalon, V., Gao, F., Puurunen, R. L., Kessels, E. & Knoops, H., 22 Jan 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

1 Citation (Scopus)

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Erwin Kessels, W. M. M. & Knoops, H. C. M., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 37, 3, 030908.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition
atomic layer epitaxy
profiles
high aspect ratio
Temperature

Mechanisms limiting conformality in thermal and plasma-assisted ALD investigated by Lateral High Aspect Ratio structures

Utriainen, M., Gao, F., Puurunen, R. L., Arts, K., Vandalon, V., Kessels, E. & Knoops, H., 30 Jul 2018. 1 p.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Open Access
high aspect ratio
profiles
penetration
reactivity
chemistry

Monitoring Conformality in ALD Manufacturing: Comparing Lateral and Vertical High Aspect Ratio Test Structures

Utriainen, M., Gao, F., Puurunen, R. L., Riedel, S. & Kia, A. M., 30 Jul 2018. 1 p.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Open Access
Atomic layer deposition
Aspect ratio
Monitoring
Scanning electron microscopy
Secondary ion mass spectrometry