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Feng Gao

20132019
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Fingerprint Dive into the research topics where Feng Gao is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 29 Similar Profiles
Atomic layer deposition Engineering & Materials Science
atomic layer epitaxy Physics & Astronomy
high aspect ratio Physics & Astronomy
Aspect ratio Engineering & Materials Science
Silicon Engineering & Materials Science
Catheters Engineering & Materials Science
Pressure sensors Engineering & Materials Science
Thin films Engineering & Materials Science

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Research Output 2013 2019

Advanced Lateral High Aspect Ratio Test Structures for Conformality Characterization by Optical Microscopy

Ylivaara, O. M. E., Hyttinen, P., Arts, K., Gao, F., Erwin Kessels, W. M. M., Puurunen, R. L. & Utriainen, M., 22 Jul 2019, ALD 2019 Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

high aspect ratio
microscopy
image analysis
atomic layer epitaxy
metrology

New pressure sensing elements for FFR coronary catheter

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Catheters
Pressure sensors
Pressure
Micro-Electrical-Mechanical Systems
Wire

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2O3

Utriainen, M., Arts, K., Vandalon, V., Gao, F., Puurunen, R. L., Kessels, E. & Knoops, H., 22 Jan 2019.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

1 Citation (Scopus)

Sticking probabilities of H2O and Al(CH3)3 during atomic layer deposition of Al2 O3 extracted from their impact on film conformality

Arts, K., Vandalon, V., Puurunen, R. L., Utriainen, M., Gao, F., Erwin Kessels, W. M. M. & Knoops, H. C. M., 24 Apr 2019, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 37, 3, 030908.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer deposition
atomic layer epitaxy
profiles
high aspect ratio
Temperature

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M. & Puurunen, R. L., 15 Oct 2019.

Research output: Contribution to conferenceConference PosterScientificpeer-review