Research Output per year
Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.
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Capillary electrophoresis
Chemical Compounds
Quartz crystal microbalances
Chemical Compounds
Electrodeposition
Chemical Compounds
electrodeposition
Physics & Astronomy
Metals
Chemical Compounds
resonators
Physics & Astronomy
stiction
Physics & Astronomy
Stiction
Chemical Compounds
Research Output 2000 2013
Digest of Technical Papers: Microwave amplification with nanomechanical resonators
Massel, F., Heikkilä, T. T., Pirkkalainen, J-M., Cho, S-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. Institute of Electrical and Electronic Engineers IEEE, Vol. 56. p. 198 - 199 6487698Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Research › peer-review
tunable filters
quartz
relaxation time
resonators
communication
Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition
Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.Research output: Contribution to journal › Article › Scientific › peer-review
stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems
Microwave amplification with nanomechanical resonators
Massel, F., Heikkilä, T., Pirkkalainen, J-M., Cho, S., Saloniemi, H., Hakonen, P. & Sillanpää, M., 2011, In : Nature. 480, p. 351-354 4 p.Research output: Contribution to journal › Article › Scientific › peer-review
resonators
microwaves
superconducting devices
radiation pressure
stimulated emission
Stability and Residue Studies of Complexing Agents in SC-1 Bath
Saloniemi, H., Eränen, S., Ketola, R. A., Kokkonen, J., Lehto, S., Luomanperä, K., Vastamäki, P., Sirén, H. & Anttila, O., 2003, In : Solid State Phenomena. 92, p. 41-44Research output: Contribution to journal › Article › Scientific › peer-review
Capillary electrophoresis
Electrospray ionization
electrophoresis
Mass spectrometry
baths
Stability and residue studies on complexing agents in SC-1 bath
Saloniemi, H., Eränen, S., Ketola, R., Kokkonen, J., Lehto, S., Luomaperä, K., Vastamäki, P., Siren, H. & Anttila, O., 2003, Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Heyns, M. & Mertens, P. (eds.). Trans Tech Publications, p. 41Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Research