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Heini Saloniemi

20002013
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Fingerprint Dive into the research topics where Heini Saloniemi is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 4 Similar Profiles
Capillary electrophoresis Chemical Compounds
Quartz crystal microbalances Chemical Compounds
Electrodeposition Chemical Compounds
electrodeposition Physics & Astronomy
Metals Chemical Compounds
resonators Physics & Astronomy
stiction Physics & Astronomy
Stiction Chemical Compounds

Research Output 2000 2013

  • 5 Article
  • 4 Conference article in proceedings
  • 1 Dissertation

Digest of Technical Papers: Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T. T., Pirkkalainen, J-M., Cho, S-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. Institute of Electrical and Electronic Engineers IEEE, Vol. 56. p. 198 - 199 6487698

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

tunable filters
quartz
relaxation time
resonators
communication
9 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleScientificpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems
140 Citations (Scopus)

Microwave amplification with nanomechanical resonators

Massel, F., Heikkilä, T., Pirkkalainen, J-M., Cho, S., Saloniemi, H., Hakonen, P. & Sillanpää, M., 2011, In : Nature. 480, p. 351-354 4 p.

Research output: Contribution to journalArticleScientificpeer-review

resonators
microwaves
superconducting devices
radiation pressure
stimulated emission

Stability and Residue Studies of Complexing Agents in SC-1 Bath

Saloniemi, H., Eränen, S., Ketola, R. A., Kokkonen, J., Lehto, S., Luomanperä, K., Vastamäki, P., Sirén, H. & Anttila, O., 2003, Ultra Clean Processing of Silicon Surfaces VI. Heyns, M., Mertens, P. & Meuris, M. (eds.). p. 41-44 (Solid State Phenomena, Vol. 92).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Capillary electrophoresis
Electrospray ionization
Mass spectrometry
Etidronic Acid
Secondary ion mass spectrometry

Stability and residue studies on complexing agents in SC-1 bath

Saloniemi, H., Eränen, S., Ketola, R., Kokkonen, J., Lehto, S., Luomaperä, K., Vastamäki, P., Siren, H. & Anttila, O., 2003, Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Heyns, M. & Mertens, P. (eds.). Trans Tech Publications, p. 41

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific