Projects per year
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Dive into the research topics where Heini Saloniemi is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Projects
- 1 Active
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ZeroChip: Circularity in Semiconductor fabrication
Arnold, M. (Manager), Harju, N. (Participant), Pihkola, H. (Participant), Sarkkinen, J. (Participant), Kinnunen, K. (Participant), Saloniemi, H. (Participant) & Valkokari, K. (Participant)
1/01/24 → 31/12/25
Project: Business Finland project
Research output
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Digest of Technical Papers: Microwave amplification with nanomechanical resonators
Massel, F., Heikkilä, T. T., Pirkkalainen, J.-M., Cho, S.-U., Saloniemi, H., Hakonen, P. J. & Sillanpää, M. A., 2013, 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers. IEEE Institute of Electrical and Electronic Engineers, p. 198-199 6487698. (Digest of Technical Papers - IEEE International Solid-State Circuits Conference, Vol. 56).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition
Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In: Sensors and Actuators A: Physical. 188, p. 240-245Research output: Contribution to journal › Article › Scientific › peer-review
15 Citations (Scopus) -
Microwave amplification with nanomechanical resonators
Massel, F., Heikkilä, T., Pirkkalainen, J.-M., Cho, S., Saloniemi, H., Hakonen, P. & Sillanpää, M., 2011, In: Nature. 480, p. 351-354Research output: Contribution to journal › Article › Scientific › peer-review
264 Citations (Scopus) -
Stability and Residue Studies of Complexing Agents in SC-1 Bath
Saloniemi, H., Eränen, S., Ketola, R. A., Kokkonen, J., Lehto, S., Luomanperä, K., Vastamäki, P., Sirén, H. & Anttila, O., 2003, Ultra Clean Processing of Silicon Surfaces VI. Heyns, M., Mertens, P. & Meuris, M. (eds.). p. 41-44 (Solid State Phenomena, Vol. 92).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Stability and residue studies on complexing agents in SC-1 bath
Saloniemi, H., Eränen, S., Ketola, R., Kokkonen, J., Lehto, S., Luomaperä, K., Vastamäki, P., Siren, H. & Anttila, O., 2003, Proceedings of the International Symposium on Ultra Clean Processing of Silicon Surfaces, UCPSS 2002. Heyns, M. & Mertens, P. (eds.). Trans Tech Publications, p. 41Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific