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Henri Ailas

  • Phone+358401429812

Research output per year

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Research Output

  • 1 Conference article in proceedings
  • 1 Master's thesis

Copper thermocompression for MEMS encapsulation: Master’s thesis

Ailas, H., 7 May 2019, Aalto University. 97 p.

Research output: ThesisMaster's thesis

Open Access
  • Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

    Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 8760353

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review