Jaakko Saarilahti

Senior Scientist, BA1401 MEMS

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MEMS Engineering & Materials Science

Rapid thermal annealing Engineering & Materials Science

backscattering Physics & Astronomy

Silicon Engineering & Materials Science

ultrasonics Physics & Astronomy

Atomic layer epitaxy Engineering & Materials Science

transducers Physics & Astronomy

Waveguides Engineering & Materials Science

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Research Output 1985 2019

25 Article
21 Conference article in proceedings
2 Conference Abstract
1 Report
3 More

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Karuthedath, C., Thanniyil Sebastian, A., Saarilahti, J. & Sillanpää, T., 6 Oct 2019, 2019 IEEE International Ultrasonics Symposium (IUS). IEEE Institute of Electrical and Electronic Engineers

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

aluminum nitrides

flow measurement

air flow

transducers

ultrasonics

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers , p. 12-16 8760353

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Encapsulation

MEMS

Mirrors

Copper

Temperature

New pressure sensing elements for FFR coronary catheter

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.

Research output: Contribution to journal › Article › Scientific › peer-review

Catheters

Pressure sensors

Pressure

Micro-Electrical-Mechanical Systems

Wire

Silicon gradient refractive index lens for millimeter wave radiometers

Pursula, P., Lamminen, A., Mannila, R., Tappura, K. & Saarilahti, J., Sep 2019, IRMMW-THz 2019: 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Institute of Electrical and Electronic Engineers , 8874541. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Radiometers

Millimeter waves

Lenses

Refractive index

Silicon

Comparison of micromachined dielectric and metallic waveguides for THz applications

Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 17 Aug 2018, 2018 11th Global Symposium on Millimeter Waves, GSMM 2018. IEEE Institute of Electrical and Electronic Engineers , 8439194

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

dielectric waveguides

Waveguides

waveguides

Dielectric waveguides

low frequencies

Prizes

2017 EuMC Microwave Prize

Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017

Prize

microwave