Research Output per year
Fingerprint Dive into the research topics where Jaakko Saarilahti is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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MEMS
Engineering & Materials Science
Rapid thermal annealing
Engineering & Materials Science
backscattering
Physics & Astronomy
Atomic layer epitaxy
Engineering & Materials Science
Silicon
Engineering & Materials Science
Waveguides
Engineering & Materials Science
ultrasonics
Physics & Astronomy
Catheters
Engineering & Materials Science
Network
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Research Output 1985 2019
Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS mirror
Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 22 May 2019, (Submitted) International Microelectronics and Packaging Society, Nordic: NordPac 2019.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Encapsulation
MEMS
Mirrors
Copper
Temperature
New pressure sensing elements for FFR coronary catheter
Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.Research output: Contribution to journal › Article › Scientific › peer-review
Catheters
Pressure sensors
Pressure
Micro-Electrical-Mechanical Systems
Wire
Comparison of micromachined dielectric and metallic waveguides for THz applications
Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 17 Aug 2018, 2018 11th Global Symposium on Millimeter Waves, GSMM 2018. Institute of Electrical and Electronic Engineers IEEE, 8439194Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
dielectric waveguides
Waveguides
waveguides
Dielectric waveguides
low frequencies
Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters
Lamminen, A., Saarilahti, J., Pursula, P., Kantanen, M. & Ermolov, V., 25 Sep 2018, Proceedings of the 48th European Microwave Conference. Madrid, Spain: Institute of Electrical and Electronic Engineers IEEE, p. 284-287 4 p. 8541742Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Waveguides
waveguides
filters
Fabrication
Silicon
1
Citation
(Scopus)
Micromachining integration platform for sub-terahertz and terahertz systems
Ermolov, V., Lamminen, A., Saarilahti, J., Wälchli, B., Kantanen, M. & Pursula, P., 2018, In : International Journal of Microwave and Wireless Technologies. 10, 56, p. 651-659 9 p.Research output: Contribution to journal › Article › Scientific › peer-review
Micromachining
Monolithic integrated circuits
Waveguides
Waveguide filters
Silicon wafers
Prizes
2017 EuMC Microwave Prize
Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017
Prize
microwave