Jaakko Saarilahti

1987 …2018
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MEMS Engineering & Materials Science
Rapid thermal annealing Engineering & Materials Science
backscattering Physics & Astronomy
Atomic layer epitaxy Engineering & Materials Science
ultrasonics Physics & Astronomy
Silicon Chemical Compounds
transducers Physics & Astronomy
Ions Engineering & Materials Science

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Research Output 1987 2018

Comparison of micromachined dielectric and metallic waveguides for THz applications

Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 17 Aug 2018, 2018 11th Global Symposium on Millimeter Waves, GSMM 2018. Institute of Electrical and Electronic Engineers IEEE, 8439194

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

dielectric waveguides
Waveguides
waveguides
Dielectric waveguides
low frequencies

Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters

Lamminen, A., Saarilahti, J., Pursula, P., Kantanen, M. & Ermolov, V., 25 Sep 2018, Proceedings of the 48th European Microwave Conference. Madrid, Spain: Institute of Electrical and Electronic Engineers IEEE, p. 284-287 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

waveguides
filters
fabrication
silicon
micromachining
1 Citations

Micromachining integration platform for sub-terahertz and terahertz systems

Ermolov, V., Lamminen, A., Saarilahti, J., Wälchli, B., Kantanen, M. & Pursula, P., 10 Apr 2018, (Accepted/In press) In : International Journal of Microwave and Wireless Technologies. p. 1-9 9 p.

Research output: Contribution to journalArticleResearchpeer-review

Micromachining
Monolithic integrated circuits
Waveguides
Waveguide filters
Silicon wafers

Bulge testing of freestanding ALD thin film membranes

Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J. & Puurunen, R., 2017.

Research output: Contribution to conferenceConference AbstractResearchpeer-review

Integration of a capacitive pressure sensing system into the outer catheter wall for coronary artery FFR measurements

Stam, F., Kuisma, H., Gao, F., Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Marrinan, B. & Pintal, S., 2017, Bio-MEMS and Medical Microdevices III. (Proceedings of SPIE; vol. 10247).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsResearchpeer-review

Catheters
Pressure sensors
Blood
Blood vessels
Application specific integrated circuits

Prizes

47th EuMC Microwave Prize

Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017

Prize

honors and awards