Research Output per year
Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.
MEMS
Engineering & Materials Science
Rapid thermal annealing
Engineering & Materials Science
backscattering
Physics & Astronomy
Atomic layer epitaxy
Engineering & Materials Science
ultrasonics
Physics & Astronomy
Silicon
Chemical Compounds
transducers
Physics & Astronomy
Ions
Engineering & Materials Science
Network
Recent external collaboration on country level. Dive into details by clicking on the dots.
Research Output 1987 2018
Comparison of micromachined dielectric and metallic waveguides for THz applications
Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 17 Aug 2018, 2018 11th Global Symposium on Millimeter Waves, GSMM 2018. Institute of Electrical and Electronic Engineers IEEE, 8439194Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Research › peer-review
dielectric waveguides
Waveguides
waveguides
Dielectric waveguides
low frequencies
Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters
Lamminen, A., Saarilahti, J., Pursula, P., Kantanen, M. & Ermolov, V., 25 Sep 2018, Proceedings of the 48th European Microwave Conference. Madrid, Spain: Institute of Electrical and Electronic Engineers IEEE, p. 284-287 4 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Research › peer-review
waveguides
filters
fabrication
silicon
micromachining
Micromachining integration platform for sub-terahertz and terahertz systems
Ermolov, V., Lamminen, A., Saarilahti, J., Wälchli, B., Kantanen, M. & Pursula, P., 10 Apr 2018, (Accepted/In press) In : International Journal of Microwave and Wireless Technologies. p. 1-9 9 p.Research output: Contribution to journal › Article › Research › peer-review
Micromachining
Monolithic integrated circuits
Waveguides
Waveguide filters
Silicon wafers
Bulge testing of freestanding ALD thin film membranes
Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J. & Puurunen, R., 2017.Research output: Contribution to conference › Conference Abstract › Research › peer-review
Integration of a capacitive pressure sensing system into the outer catheter wall for coronary artery FFR measurements
Stam, F., Kuisma, H., Gao, F., Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Marrinan, B. & Pintal, S., 2017, Bio-MEMS and Medical Microdevices III. (Proceedings of SPIE; vol. 10247).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Research › peer-review
Catheters
Pressure sensors
Blood
Blood vessels
Application specific integrated circuits
Prizes
47th EuMC Microwave Prize
Pekka Pursula (Recipient), Antti Lamminen (Recipient), Mikko Kantanen (Recipient), Jaakko Saarilahti (Recipient) & Vladimir Ermolov (Recipient), 12 Oct 2017
Prize
honors and awards