Jaakko Saarilahti

1985 …2019
If you made any changes in Pure these will be visible here soon.

Fingerprint Dive into the research topics where Jaakko Saarilahti is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Engineering & Materials Science

MEMS
Rapid thermal annealing
Atomic layer epitaxy
Silicon
Waveguides
Catheters
Ions
Pressure sensors
Rutherford backscattering spectroscopy
Backscattering
Fabrication
Ion implantation
Diffusion barriers
Gallium arsenide
Germanium
Monolithic microwave integrated circuits
Chemical reactions
Application specific integrated circuits
Magnetometers
Ion bombardment
Sensors
Thin films
Secondary ion mass spectrometry
Waveguide filters
Temperature
Titanium
Silicon wafers
Electrostatics
Silver
Annealing
Indium arsenide
Silicides
Full width at half maximum
Micromachining
Aluminum
Tantalum oxides
Semiconductor quantum wells
Membranes
Reaction products
Multilayers
Leakage currents
Lorentz force
Crystalline materials
Tungsten
Kinetics
Ultrasonic transducers
Deep level transient spectroscopy
Thermodynamic stability
Titanium nitride
Aluminum nitride

Physics & Astronomy

Engineering

backscattering
microelectromechanical systems
microphones
fabrication
annealing
SOI (semiconductors)

General

ultrasonics
transducers
membranes
chips
magnetometers
thin films
sensors
waveguides
solid state
profiles
Finland
ion implantation
integrated circuits
dielectric waveguides
adhesion tests
kinetics
diaphragms
thermal stability
coils
reaction products
Josephson junctions

Chemistry and Materials

atomic layer epitaxy
silicon
titanium nitrides
chemical reactions
titanium
silver
tantalum oxides
tetrachlorides
germanium
aluminum nitrides
silicon nitrides
silicon carbides
hydrides
aluminum
gases
gallium

Aerospace Sciences

spectroscopy
secondary ion mass spectrometry

Physics

ions
helium ions
flux density

Mathematical and Computer Sciences

personal computers

Life Sciences

arteries

Chemical Compounds

Silicon
Rapid thermal annealing
Rutherford backscattering spectroscopy
Germanium
Atomic layer epitaxy
Ions
Diffusion barriers
Titanium
Silver
Ion implantation
Chemical reactions
Tungsten
Secondary ion mass spectrometry
Tantalum
Reaction products
Multilayers
Leakage currents
Thin films
Backscattering
Kinetics
Deep level transient spectroscopy
Thermodynamic stability
Integrated circuits
Spectroscopy
Aluminum Oxide
Amorphization
Catheters
Steel
Aluminum
Monolithic microwave integrated circuits
Defects
Electric current measurement
Magnetometers
Contact resistance
Microphones
Metallizing
Polysilicon
Hydrides
Personal computers
Oxide films
Annealing
Structural properties
Sheet resistance
Silicon wafers
Waveguides
Sandwich structures
Vapors