Jaakko Saarilahti

1985 …2019
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Research Output 1985 2019

2019

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 22 May 2019, (Submitted) International Microelectronics and Packaging Society, Nordic: NordPac 2019.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Encapsulation
MEMS
Mirrors
Copper
Temperature

New pressure sensing elements for FFR coronary catheter

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Catheters
Pressure sensors
Pressure
Micro-Electrical-Mechanical Systems
Wire
2018

Comparison of micromachined dielectric and metallic waveguides for THz applications

Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 17 Aug 2018, 2018 11th Global Symposium on Millimeter Waves, GSMM 2018. Institute of Electrical and Electronic Engineers IEEE, 8439194

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

dielectric waveguides
Waveguides
waveguides
Dielectric waveguides
low frequencies

Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters

Lamminen, A., Saarilahti, J., Pursula, P., Kantanen, M. & Ermolov, V., 25 Sep 2018, Proceedings of the 48th European Microwave Conference. Madrid, Spain: Institute of Electrical and Electronic Engineers IEEE, p. 284-287 4 p. 8541742

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Waveguides
waveguides
filters
Fabrication
Silicon
1 Citation (Scopus)
Micromachining
Monolithic integrated circuits
Waveguides
Waveguide filters
Silicon wafers
2017

Bulge testing of freestanding ALD thin film membranes

Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J. & Puurunen, R., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

Integration of a capacitive pressure sensing system into the outer catheter wall for coronary artery FFR measurements

Stam, F., Kuisma, H., Gao, F., Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Marrinan, B. & Pintal, S., 1 Jan 2017, Bio-MEMS and Medical Microdevices III. Giouroudi, I., Giouroudi, I., Delgado-Restituto, M. & van den Driesche, S. (eds.). Vol. 10247. 1024703. (Proceedings of SPIE, Vol. 10247).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Flow Measurement
Coronary Artery
Catheters
arteries
Stenosis
2 Citations (Scopus)

Sub-THz micromachined waveguides for wafer level integration of MMICs

Pursula, P., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 19 Dec 2017, 2017 12th European Microwave Integrated Circuits Conference, EuMIC 2017. Institute of Electrical and Electronic Engineers IEEE, p. 321-324 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Waveguides
Waveguide filters
Silicon
Silicon wafers

Sub-THz micromachined waveguides for wafer level integration of MMICs

Pursula, P., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 19 Dec 2017, Proceedings of the 47th European Microwave Conference (EuMC). Institute of Electrical and Electronic Engineers IEEE, p. 1061-1064 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Waveguides
Waveguide filters
Silicon wafers
MEMS

Ultrathin MEMS pressure sensor and readout ASIC

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Feng, G., Kyynäräinen, J. & Kuisma, H., 2017, DMD Europe 2017: Micro-fabrication for medical devices: Abstracts and program. 1 p. 33

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Open Access
Pressure sensors
Application specific integrated circuits
MEMS
Capacitive sensors
Catheters

XeF2 etching of silicon using ALD films as etch stop layers

Ylivaara, O., Saarilahti, J. & Puurunen, R., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

2016
1 Citation (Scopus)

New MEMS pressure sensor element and concept for coronary catheter

Kärkkäinen, A., Saarilahti, J., Kyynäräinen, J. & Kuisma, H., 2016, In : Procedia Engineering. 168, p. 76-79

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Catheters
Pressure sensors
MEMS
Wire
Fabrication
2014

3D flip chip packaging of MEMS sensor

Gädda, A., Tuovinen, R., Rimminen, H., Lalu, S., Saarilahti, J. & Kärkkäinen, A., 1 Jan 2014, Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE, 6962737

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Soldering alloys
Packaging
Sensors
Application specific integrated circuits
Plating

A novel MEMS gas sensor based on ultrasonic resonance cavity

Koppinen, P. J., Sillanpää, T., Kärkkäinen, A., Saarilahti, J. & Seppä, H., 1 Jan 2014, IEEE International Ultrasonics Symposium, IUS. Institute of Electrical and Electronic Engineers IEEE, p. 655-658 4 p. 6931795

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
ultrasonics
cavities
sensors
gases
1 Citation (Scopus)

Emission profile of multi-membrane CMUT for in-air object localization

Caspani, A., Errico, N., Giacci, F., Langfelder, G., Longoni, A., Koppinen, P. J. & Saarilahti, J., 1 Jan 2014, In : Procedia Engineering. 87, p. 592-595 4 p.

Research output: Contribution to journalReview ArticleScientificpeer-review

Open Access
Ultrasonic transducers
Membranes
Ultrasonic waves
Air
Full width at half maximum

Final Activity Report of F4E-GRT-156

Kyynäräinen, J. & Saarilahti, J., 2014, Espoo: VTT Technical Research Centre of Finland. (VTT Research Report; No. VTT-R-01424-14).

Research output: Book/ReportReportProfessional

2013
2 Citations (Scopus)

Characterization and operation of different cMUT membranes in air

Caspani, A., Langfelder, G., Minotti, P., Longoni, A. & Saarilahti, J., 1 Dec 2013, 2013 IEEE International Ultrasonics Symposium (IUS). Institute of Electrical and Electronic Engineers IEEE, p. 1720-1723 6724996

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

transducers
ultrasonics
membranes
mechanical measurement
piezoelectric transducers
2012

Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm

Pursula, P., Saarilahti, J., Paul, O. & Viikari, V., 2012, Proceedings MME 2012. Ilmenau, Germany, 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
diaphragms
transducers
ultrasonics
electrical impedance
mechanical impedance
2010
6 Citations (Scopus)

Low-Temperature Processes for MEMS Device Fabrication

Kiihamäki, J., Kattelus, H., Blomberg, M., Puurunen, R., Laamanen, M., Pekko, P., Saarilahti, J., Ritala, H. & Rissanen, A., 2010, Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Gusev, E., Garfunkel, E. & Dideikin, A. (eds.). Springer, p. 167-178 (NATO Science for Peace and Security Series B: Physics and Biophysics).

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

MEMS
Fabrication
Wafer bonding
Temperature
Hydrofluoric acid
2008
68 Citations (Scopus)

A 3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Kärkkäinen, A., Meinander, T., Oja, A., Pekko, P., Seppä, H., Suhonen, M., Kuisma, H., Ruotsalainen, S. & Tilli, M., 10 Apr 2008, In : Sensors and Actuators A: Physical. 142, 2, p. 561-568 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Magnetometers
magnetometers
chips
coils
flux density
2007
10 Citations (Scopus)

3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Meinander, T., Suhonen, M., Oja, A., Seppä, H., Pekko, P., Kuisma, H., Ruotsalainen, S. & Tilli, M., 1 Mar 2007, In : Sensor Letters. 5, 1, p. 126-129

Research output: Contribution to journalArticleScientificpeer-review

Magnetometers
magnetometers
chips
coils
flux density
64 Citations (Scopus)

Implementing ALD layers in MEMS processing

Puurunen, R. L., Saarilahti, J. & Kattelus, H., 1 Dec 2007, In : ECS Transactions. 11, 7, p. 3-14 12 p.

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Deposits
Processing
Lorentz force
Insulation
2002

Nanosåll nytt hjälpmedel inom mikromekaniken

Kattelus, H., Saarilahti, J., Kiihamäki, J. & Gyllenberg, U., 2002, In : Elektronik i Norden. 19, del 2/40.

Research output: Contribution to journalArticleProfessional

2000
72 Citations (Scopus)

Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Torkkeli, A., Rusanen, O., Saarilahti, J., Seppä, H., Sipola, H. & Hietanen, J., 25 Aug 2000, In : Sensors and Actuators A: Physical. 85, 1, p. 116-123

Research output: Contribution to journalArticleScientificpeer-review

Microphones
microphones
Polysilicon
membranes
Membranes
1999
2 Citations (Scopus)

Capacitive Silicon Microphone

Torkkeli, A., Saarilahti, J., Seppä, H., Sipola, H., Rusanen, O. & Hietanen, J., 1 Dec 1999, Proceedings of the 18th Nordic Semiconductor Meeting. Institute of Physics IOP, p. 275-278 4 p. (Physica Scripta: Topical Issues, Vol. 79).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microphones
Silicon
Membrane
membranes
silicon
4 Citations (Scopus)

Diffusion Barrier Performance of thin Cr Films in the Cu/Cr/Si Structure

Ezer, Y., Härkönen, J., Arpiainen, S., Sokolov, V., Kuivalainen, P., Saarilahti, J. & Kaitila, J., 1 Dec 1999, Proceedings of the 18th Nordic Semiconductor Meeting. Institute of Physics IOP, Vol. 79. p. 228-231 4 p. (Physica Scripta: Topical Issues, Vol. 79).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

adhesion tests
thin films
laminates
Auger spectroscopy
electron spectroscopy
1998
20 Citations (Scopus)

Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure

Ezer, Y., Härkönen, J., Sokolov, V., Saarilahti, J., Kaitila, J. & Kuivalainen, P., 1998, In : Materials Research Bulletin. 33, 9, p. 1331-1337

Research output: Contribution to journalArticleScientificpeer-review

Deep level transient spectroscopy
Diffusion barriers
Thin films
Sheet resistance
Rutherford backscattering spectroscopy
1997
15 Citations (Scopus)

Rutherford backscattering and kinetics study of the photo-induced solid state chemical reaction between silver and amorphous As33S67 layers

Wagner, T., Perina, V., Vleck, M., Fumar, M., Rauhala, E., Saarilahti, J. & Ewen, P., 1 Jan 1997, In : Journal of Non-Crystalline Solids. 212, 2-3, p. 157-165 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Rutherford backscattering spectroscopy
Silver
Chemical reactions
chemical reactions
backscattering
1996
2 Citations (Scopus)

Kinetics and Rutherford backscattering study of the photo-induced solid state chemical reaction between silver and amorphous As33S67 layers

Wagner, T., Vlcek, M., Frumar, M., Perina, V., Rauhala, E., Saarilahti, J. & Ewen, P. J., 1 Jan 1996, Developments in Optical Component Coatings. Reid, I. (ed.). International Society for Optics and Photonics SPIE, p. 244-254 (Proceedings of SPIE, Vol. 2776).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Backscattering
Rutherford backscattering spectroscopy
Silver
Chemical Reaction
Chemical reactions
1995
2 Citations (Scopus)

Structural properties of Ge-implanted Si1xGex layers

Xia, Z., Ristolainen, EO. O., Ronkainen, H., Saarilahti, J., Grahn, K. & Molarius, J., 1995, In : Vacuum. 46, 8-10, p. 1071-1075 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Rapid thermal annealing
Structural properties
Ions
annealing
Silicon
1994
4 Citations (Scopus)

Amorphization of silicon by high dose germanium ion implantation with no external cooling mechanism

Xia, Z., Saarilahti, J., Ristolainen, E., Eränen, S., Ronkainen, H., Kuivalainen, P., Paine, D. & Tuomi, T., 1 Jan 1994, In : Applied Surface Science. 78, 3, p. 321-330 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Germanium
Amorphization
Silicon
Ion implantation
Ions

Characterization of Nb/Al-AlOx/Nb Josephson junction structures by SIMS, RS and anodization spectroscopy

Likonen, J., Saarilahti, J., Grönberg, L. & Kiviranta, M., 20 Sep 1994, Secondary Ion Mass Spectrometry, SIMS IX: proceedings of the Ninth International Conference on Secondary Ion Mass Spectrometry (SIMS IX). Wiley-Blackwell, p. 531-534

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Growth of silicon carbide on (100) silicon substrates by molecular beam epitaxy

Airaksinen, V. M., Kaitila, J., Niemi, H., Lahtinen, J. & Saarilahti, J., 1 Jan 1994, In : Physica Scripta. 1994, T54, p. 205-207 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Epitaxy
silicon carbides
Silicon
molecular beam epitaxy
Substrate
6 Citations (Scopus)

Rapid thermal annealing of SI1-x GEx layers formed by germanium ion implantation

Xia, Z., Saarilahti, J., Ronkainen, H., Eränen, S., Suni, I., Molarius, J., Kuivalainen, P., Ristolainen, E. & Tuomi, T., 3 May 1994, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 88, 3, p. 247-254 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Germanium
Rapid thermal annealing
Ion implantation
ion implantation
germanium

RBS channeling spectroscopy of Ge implanted epitaxial Si1-x Gex layers

Saarilahti, J., Xia, Z., Ronkainen, H., Kuivalainen, P. & Suni, I., 1 Jan 1994, In : Physica Scripta. 1994, T54, p. 212-215 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Spectroscopy
Implantation
Ion Implantation
SiGe
Dose
1993
1 Citation (Scopus)
Secondary ion mass spectrometry
Josephson junctions
secondary ion mass spectrometry
Spectroscopy
spectroscopy

Influence of substrate material, sputter cleaning and intermediate layer on the adhesion of RF-plasma a-C:H coatings

Vihersalo, J., Varjus, S., Ehrnsten, U., Zilliacus, R., Saarilahti, J., Nenonen, P. & Ronkainen, H., 1993, 2nd International Conference on the Applications of Diamond Films and Related Materials: Omiya, Saitama, Japan, August 25-27, 1993. Yoshikawa, M. (ed.). 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

50 Citations (Scopus)

Layered tantalum-aluminum oxide films deposited by atomic layer epitaxy

Kattelus, H., Ylilammi, M., Saarilahti, J., Antson, J. & Lindfors, S., 25 Mar 1993, In : Thin Solid Films. 225, 1-2, p. 296-298 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer epitaxy
Tantalum oxides
Tantalum
tantalum oxides
Aluminum Oxide
1992
1 Citation (Scopus)

Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films

Saarilahti, J., Salmi, J., Likonen, J. & Rauhala, E., 2 Feb 1992, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 64, 1-4, p. 193-197

Research output: Contribution to journalArticleScientificpeer-review

Thin films
Ions
thin films
ions
Backscattering
286 Citations (Scopus)

Interactive personal-computer data analysis of ion backscattering spectra

Saarilahti, J. & Rauhala, E., 2 Feb 1992, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 64, 1-4, p. 734-738 5 p.

Research output: Contribution to journalArticleScientificpeer-review

personal computers
Backscattering
Personal computers
backscattering
Ions
12 Citations (Scopus)

Investigation on the origin and nature of the microstructural features related to corrosion initiation in titanium-aluminium nitride coated steel

Ronkainen, H., Ehrnsten, U., Zilliacus, R., Saarilahti, J., Mahiout, A. & Hannula, S-P., 1992, In : Thin Solid Films. 220, 1-2, p. 160-165 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Aluminum nitride
titanium nitrides
Steel
aluminum nitrides
Titanium
1991
20 Citations (Scopus)

Protons, helium and heavy ions in backscattering analysis of high-Tc superconductors

Rauhala, E., Saarilahti, J. & Nath, N., 2 Jul 1991, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 61, 1, p. 83-90 8 p.

Research output: Contribution to journalArticleScientificpeer-review

helium ions
Backscattering
Heavy ions
Superconducting materials
Helium
8 Citations (Scopus)

Tungsten silicide formation from sequentially sputtered tungsten and silicon films

Molarius, J., Franssila, S., Drozdy, G. & Saarilahti, J., 17 Aug 1991, In : Applied Surface Science. 53, p. 383-390

Research output: Contribution to journalArticleScientificpeer-review

Tungsten
Silicon
Rapid thermal annealing
Oxygen supply
Multilayers
1990
6 Citations (Scopus)

Atomic layer epitaxy of III-V compounds in a hydride vapor phase system

Ahopelto, J., Kattelus, H., Saarilahti, J. & Suni, I., 1990, In : Journal of Crystal Growth. 99, 1-4, p. 550-555 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer epitaxy
Gallium arsenide
atomic layer epitaxy
Hydrides
hydrides

Protons, helium and heavy ions in backscattering analysis of high-Tc superconductors

Rauhala, E., Saarilahti, J. & Nath, N., 1990, In : Bulletin of the American Physical Society, Ser. II. 35, 8, 1695.

Research output: Contribution to journalOther journal contributionScientific

1987

The effect of ion-irradiation and rapid thermal annealing on TiSieand MoSie

Groberg, L., Krontiras, C., Saarilahti, J. & Suni, I., 1 Jan 1987, ESSDERC '87: 17th European Solid State Device Research Conference. Institute of Electrical and Electronic Engineers IEEE, p. 209-212 5436541

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Rapid thermal annealing
Ion bombardment
Cams
Recovery
Ions
1 Citation (Scopus)

Transport properties of silicides: effects of ion-irradiation and annealing

Suni, I., Grönberg, L. & Saarilahti, J., 1987, In : Vide, les Couches Minces. 42, 236, p. 233-236 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicides
Rapid thermal annealing
Ion bombardment
Transport properties
Annealing
1985
62 Citations (Scopus)
Titanium nitride
Diffusion barriers
titanium nitrides
Electric current measurement
Contact resistance