Jaakko Saarilahti

1985 …2019
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Research Output 1985 2019

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Conference article in proceedings
2019

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 22 May 2019, (Submitted) International Microelectronics and Packaging Society, Nordic: NordPac 2019.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Encapsulation
MEMS
Mirrors
Copper
Temperature
2018

Comparison of micromachined dielectric and metallic waveguides for THz applications

Pursula, P., Cherchi, M., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 17 Aug 2018, 2018 11th Global Symposium on Millimeter Waves, GSMM 2018. Institute of Electrical and Electronic Engineers IEEE, 8439194

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

dielectric waveguides
Waveguides
waveguides
Dielectric waveguides
low frequencies

Impact of Fabrication Process Tolerances on Characteristics of Sub-THz Silicon Micromachined Filters

Lamminen, A., Saarilahti, J., Pursula, P., Kantanen, M. & Ermolov, V., 25 Sep 2018, Proceedings of the 48th European Microwave Conference. Madrid, Spain: Institute of Electrical and Electronic Engineers IEEE, p. 284-287 4 p. 8541742

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Waveguides
waveguides
filters
Fabrication
Silicon
2017

Integration of a capacitive pressure sensing system into the outer catheter wall for coronary artery FFR measurements

Stam, F., Kuisma, H., Gao, F., Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Marrinan, B. & Pintal, S., 1 Jan 2017, Bio-MEMS and Medical Microdevices III. Giouroudi, I., Giouroudi, I., Delgado-Restituto, M. & van den Driesche, S. (eds.). Vol. 10247. 1024703. (Proceedings of SPIE, Vol. 10247).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Flow Measurement
Coronary Artery
Catheters
arteries
Stenosis
2 Citations (Scopus)

Sub-THz micromachined waveguides for wafer level integration of MMICs

Pursula, P., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 19 Dec 2017, 2017 12th European Microwave Integrated Circuits Conference, EuMIC 2017. Institute of Electrical and Electronic Engineers IEEE, p. 321-324 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Waveguides
Waveguide filters
Silicon
Silicon wafers

Sub-THz micromachined waveguides for wafer level integration of MMICs

Pursula, P., Lamminen, A., Kantanen, M., Saarilahti, J. & Ermolov, V., 19 Dec 2017, Proceedings of the 47th European Microwave Conference (EuMC). Institute of Electrical and Electronic Engineers IEEE, p. 1061-1064 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Monolithic microwave integrated circuits
Waveguides
Waveguide filters
Silicon wafers
MEMS
2014

3D flip chip packaging of MEMS sensor

Gädda, A., Tuovinen, R., Rimminen, H., Lalu, S., Saarilahti, J. & Kärkkäinen, A., 1 Jan 2014, Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014. Institute of Electrical and Electronic Engineers IEEE, 6962737

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Soldering alloys
Packaging
Sensors
Application specific integrated circuits
Plating

A novel MEMS gas sensor based on ultrasonic resonance cavity

Koppinen, P. J., Sillanpää, T., Kärkkäinen, A., Saarilahti, J. & Seppä, H., 1 Jan 2014, IEEE International Ultrasonics Symposium, IUS. Institute of Electrical and Electronic Engineers IEEE, p. 655-658 4 p. 6931795

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
ultrasonics
cavities
sensors
gases
2013
2 Citations (Scopus)

Characterization and operation of different cMUT membranes in air

Caspani, A., Langfelder, G., Minotti, P., Longoni, A. & Saarilahti, J., 1 Dec 2013, 2013 IEEE International Ultrasonics Symposium (IUS). Institute of Electrical and Electronic Engineers IEEE, p. 1720-1723 6724996

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

transducers
ultrasonics
membranes
mechanical measurement
piezoelectric transducers
2012

Analytical electromechanical model for CMUTs with multi-layered, non-uniform diaphragm

Pursula, P., Saarilahti, J., Paul, O. & Viikari, V., 2012, Proceedings MME 2012. Ilmenau, Germany, 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Open Access
diaphragms
transducers
ultrasonics
electrical impedance
mechanical impedance
1999
2 Citations (Scopus)

Capacitive Silicon Microphone

Torkkeli, A., Saarilahti, J., Seppä, H., Sipola, H., Rusanen, O. & Hietanen, J., 1 Dec 1999, Proceedings of the 18th Nordic Semiconductor Meeting. Institute of Physics IOP, p. 275-278 4 p. (Physica Scripta: Topical Issues, Vol. 79).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microphones
Silicon
Membrane
membranes
silicon
4 Citations (Scopus)

Diffusion Barrier Performance of thin Cr Films in the Cu/Cr/Si Structure

Ezer, Y., Härkönen, J., Arpiainen, S., Sokolov, V., Kuivalainen, P., Saarilahti, J. & Kaitila, J., 1 Dec 1999, Proceedings of the 18th Nordic Semiconductor Meeting. Institute of Physics IOP, Vol. 79. p. 228-231 4 p. (Physica Scripta: Topical Issues, Vol. 79).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

adhesion tests
thin films
laminates
Auger spectroscopy
electron spectroscopy
1996
2 Citations (Scopus)

Kinetics and Rutherford backscattering study of the photo-induced solid state chemical reaction between silver and amorphous As33S67 layers

Wagner, T., Vlcek, M., Frumar, M., Perina, V., Rauhala, E., Saarilahti, J. & Ewen, P. J., 1 Jan 1996, Developments in Optical Component Coatings. Reid, I. (ed.). International Society for Optics and Photonics SPIE, p. 244-254 (Proceedings of SPIE, Vol. 2776).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Backscattering
Rutherford backscattering spectroscopy
Silver
Chemical Reaction
Chemical reactions
1994

Characterization of Nb/Al-AlOx/Nb Josephson junction structures by SIMS, RS and anodization spectroscopy

Likonen, J., Saarilahti, J., Grönberg, L. & Kiviranta, M., 20 Sep 1994, Secondary Ion Mass Spectrometry, SIMS IX: proceedings of the Ninth International Conference on Secondary Ion Mass Spectrometry (SIMS IX). Wiley-Blackwell, p. 531-534

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1993

Influence of substrate material, sputter cleaning and intermediate layer on the adhesion of RF-plasma a-C:H coatings

Vihersalo, J., Varjus, S., Ehrnsten, U., Zilliacus, R., Saarilahti, J., Nenonen, P. & Ronkainen, H., 1993, 2nd International Conference on the Applications of Diamond Films and Related Materials: Omiya, Saitama, Japan, August 25-27, 1993. Yoshikawa, M. (ed.). 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1987

The effect of ion-irradiation and rapid thermal annealing on TiSieand MoSie

Groberg, L., Krontiras, C., Saarilahti, J. & Suni, I., 1 Jan 1987, ESSDERC '87: 17th European Solid State Device Research Conference. Institute of Electrical and Electronic Engineers IEEE, p. 209-212 5436541

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Rapid thermal annealing
Ion bombardment
Cams
Recovery
Ions