Jaakko Saarilahti

1985 …2019
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Research Output 1985 2019

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Conference Abstract
2017

Bulge testing of freestanding ALD thin film membranes

Ylivaara, O., Törmä, P., Stuns, I., Saarilahti, J. & Puurunen, R., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review

XeF2 etching of silicon using ALD films as etch stop layers

Ylivaara, O., Saarilahti, J. & Puurunen, R., 2017.

Research output: Contribution to conferenceConference AbstractScientificpeer-review