Jaakko Saarilahti

1985 …2019
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Research Output 1985 2019

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Article
2019

New pressure sensing elements for FFR coronary catheter

Saarilahti, J., Gomes Martins, D., Kärkkäinen, A., Gao, F., Kyynäräinen, J. & Kuisma, H., 3 Jun 2019, In : Journal of Medical Engineering & Technology. 43, 2, p. 100-110 11 p.

Research output: Contribution to journalArticleScientificpeer-review

Catheters
Pressure sensors
Pressure
Micro-Electrical-Mechanical Systems
Wire
2018
1 Citation (Scopus)
Micromachining
Monolithic integrated circuits
Waveguides
Waveguide filters
Silicon wafers
2016
2 Citations (Scopus)

New MEMS pressure sensor element and concept for coronary catheter

Kärkkäinen, A., Saarilahti, J., Kyynäräinen, J. & Kuisma, H., 2016, In : Procedia Engineering. 168, p. 76-79

Research output: Contribution to journalArticleScientificpeer-review

Open Access
Catheters
Pressure sensors
MEMS
Wire
Fabrication
2008
68 Citations (Scopus)

A 3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Kärkkäinen, A., Meinander, T., Oja, A., Pekko, P., Seppä, H., Suhonen, M., Kuisma, H., Ruotsalainen, S. & Tilli, M., 10 Apr 2008, In : Sensors and Actuators A: Physical. 142, 2, p. 561-568 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Magnetometers
magnetometers
chips
coils
flux density
2007
10 Citations (Scopus)

3D micromechanical compass

Kyynäräinen, J., Saarilahti, J., Kattelus, H., Meinander, T., Suhonen, M., Oja, A., Seppä, H., Pekko, P., Kuisma, H., Ruotsalainen, S. & Tilli, M., 1 Mar 2007, In : Sensor Letters. 5, 1, p. 126-129

Research output: Contribution to journalArticleScientificpeer-review

Magnetometers
magnetometers
chips
coils
flux density
64 Citations (Scopus)

Implementing ALD layers in MEMS processing

Puurunen, R. L., Saarilahti, J. & Kattelus, H., 1 Dec 2007, In : ECS Transactions. 11, 7, p. 3-14 12 p.

Research output: Contribution to journalArticleScientificpeer-review

MEMS
Deposits
Processing
Lorentz force
Insulation
2002

Nanosåll nytt hjälpmedel inom mikromekaniken

Kattelus, H., Saarilahti, J., Kiihamäki, J. & Gyllenberg, U., 2002, In : Elektronik i Norden. 19, del 2/40.

Research output: Contribution to journalArticleProfessional

2000
72 Citations (Scopus)

Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Torkkeli, A., Rusanen, O., Saarilahti, J., Seppä, H., Sipola, H. & Hietanen, J., 25 Aug 2000, In : Sensors and Actuators A: Physical. 85, 1, p. 116-123

Research output: Contribution to journalArticleScientificpeer-review

Microphones
microphones
Polysilicon
membranes
Membranes
1998
20 Citations (Scopus)

Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure

Ezer, Y., Härkönen, J., Sokolov, V., Saarilahti, J., Kaitila, J. & Kuivalainen, P., 1998, In : Materials Research Bulletin. 33, 9, p. 1331-1337

Research output: Contribution to journalArticleScientificpeer-review

Deep level transient spectroscopy
Diffusion barriers
Thin films
Sheet resistance
Rutherford backscattering spectroscopy
1997
15 Citations (Scopus)

Rutherford backscattering and kinetics study of the photo-induced solid state chemical reaction between silver and amorphous As33S67 layers

Wagner, T., Perina, V., Vleck, M., Fumar, M., Rauhala, E., Saarilahti, J. & Ewen, P., 1 Jan 1997, In : Journal of Non-Crystalline Solids. 212, 2-3, p. 157-165 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Rutherford backscattering spectroscopy
Silver
Chemical reactions
chemical reactions
backscattering
1995
2 Citations (Scopus)

Structural properties of Ge-implanted Si1xGex layers

Xia, Z., Ristolainen, EO. O., Ronkainen, H., Saarilahti, J., Grahn, K. & Molarius, J., 1995, In : Vacuum. 46, 8-10, p. 1071-1075 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Rapid thermal annealing
Structural properties
Ions
annealing
Silicon
1994
4 Citations (Scopus)

Amorphization of silicon by high dose germanium ion implantation with no external cooling mechanism

Xia, Z., Saarilahti, J., Ristolainen, E., Eränen, S., Ronkainen, H., Kuivalainen, P., Paine, D. & Tuomi, T., 1 Jan 1994, In : Applied Surface Science. 78, 3, p. 321-330 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Germanium
Amorphization
Silicon
Ion implantation
Ions
3 Citations (Scopus)

Growth of silicon carbide on (100) silicon substrates by molecular beam epitaxy

Airaksinen, V. M., Kaitila, J., Niemi, H., Lahtinen, J. & Saarilahti, J., 1 Jan 1994, In : Physica Scripta. 1994, T54, p. 205-207 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Epitaxy
silicon carbides
Silicon
molecular beam epitaxy
Substrate
6 Citations (Scopus)

Rapid thermal annealing of SI1-x GEx layers formed by germanium ion implantation

Xia, Z., Saarilahti, J., Ronkainen, H., Eränen, S., Suni, I., Molarius, J., Kuivalainen, P., Ristolainen, E. & Tuomi, T., 3 May 1994, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 88, 3, p. 247-254 8 p.

Research output: Contribution to journalArticleScientificpeer-review

Germanium
Rapid thermal annealing
Ion implantation
ion implantation
germanium

RBS channeling spectroscopy of Ge implanted epitaxial Si1-x Gex layers

Saarilahti, J., Xia, Z., Ronkainen, H., Kuivalainen, P. & Suni, I., 1 Jan 1994, In : Physica Scripta. 1994, T54, p. 212-215 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Spectroscopy
Implantation
Ion Implantation
SiGe
Dose
1993
1 Citation (Scopus)
Secondary ion mass spectrometry
Josephson junctions
secondary ion mass spectrometry
Spectroscopy
spectroscopy
51 Citations (Scopus)

Layered tantalum-aluminum oxide films deposited by atomic layer epitaxy

Kattelus, H., Ylilammi, M., Saarilahti, J., Antson, J. & Lindfors, S., 25 Mar 1993, In : Thin Solid Films. 225, 1-2, p. 296-298 3 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer epitaxy
Tantalum oxides
Tantalum
tantalum oxides
Aluminum Oxide
1992
1 Citation (Scopus)

Analysis of co-sputtered in situ annealed superconducting Y1Ba2Cu3O7 - x thin films

Saarilahti, J., Salmi, J., Likonen, J. & Rauhala, E., 2 Feb 1992, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 64, 1-4, p. 193-197

Research output: Contribution to journalArticleScientificpeer-review

Thin films
Ions
thin films
ions
Backscattering
287 Citations (Scopus)

Interactive personal-computer data analysis of ion backscattering spectra

Saarilahti, J. & Rauhala, E., 2 Feb 1992, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 64, 1-4, p. 734-738 5 p.

Research output: Contribution to journalArticleScientificpeer-review

personal computers
Backscattering
Personal computers
backscattering
Ions
12 Citations (Scopus)

Investigation on the origin and nature of the microstructural features related to corrosion initiation in titanium-aluminium nitride coated steel

Ronkainen, H., Ehrnsten, U., Zilliacus, R., Saarilahti, J., Mahiout, A. & Hannula, S-P., 1992, In : Thin Solid Films. 220, 1-2, p. 160-165 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Aluminum nitride
titanium nitrides
Steel
aluminum nitrides
Titanium
1991
20 Citations (Scopus)

Protons, helium and heavy ions in backscattering analysis of high-Tc superconductors

Rauhala, E., Saarilahti, J. & Nath, N., 2 Jul 1991, In : Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. 61, 1, p. 83-90 8 p.

Research output: Contribution to journalArticleScientificpeer-review

helium ions
Backscattering
Heavy ions
Superconducting materials
Helium
8 Citations (Scopus)

Tungsten silicide formation from sequentially sputtered tungsten and silicon films

Molarius, J., Franssila, S., Drozdy, G. & Saarilahti, J., 17 Aug 1991, In : Applied Surface Science. 53, p. 383-390

Research output: Contribution to journalArticleScientificpeer-review

Tungsten
Silicon
Rapid thermal annealing
Oxygen supply
Multilayers
1990
6 Citations (Scopus)

Atomic layer epitaxy of III-V compounds in a hydride vapor phase system

Ahopelto, J., Kattelus, H., Saarilahti, J. & Suni, I., 1990, In : Journal of Crystal Growth. 99, 1-4, p. 550-555 6 p.

Research output: Contribution to journalArticleScientificpeer-review

Atomic layer epitaxy
Gallium arsenide
atomic layer epitaxy
Hydrides
hydrides
1987
1 Citation (Scopus)

Transport properties of silicides: effects of ion-irradiation and annealing

Suni, I., Grönberg, L. & Saarilahti, J., 1987, In : Vide, les Couches Minces. 42, 236, p. 233-236 4 p.

Research output: Contribution to journalArticleScientificpeer-review

Silicides
Rapid thermal annealing
Ion bombardment
Transport properties
Annealing
1985
62 Citations (Scopus)
Titanium nitride
Diffusion barriers
titanium nitrides
Electric current measurement
Contact resistance