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Jaakko Salonen

19942014
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Fingerprint Dive into the research topics where Jaakko Salonen is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 3 Similar Profiles
Detectors Engineering & Materials Science
Pixels Engineering & Materials Science
chips Physics & Astronomy
Silicon Engineering & Materials Science
pixels Physics & Astronomy
Radiation detectors Engineering & Materials Science
detectors Physics & Astronomy
radiation detectors Physics & Astronomy

Research Output 1994 2014

  • 8 Article
  • 7 Conference article in proceedings
  • 1 Conference abstract in proceedings
1 Citation (Scopus)

Radiation detectors fabricated on high-purity GaAs epitaxial materials

Wu, X., Kostamo, P., Gädda, T., Nenonen, S., Riekkinen, T., Härkönen, J., Salonen, J., Andersson, H., Zhilyaev, Y., Fedorov, L., Eränen, S., Mattila, M., Lipsanen, H., Prunnila, M., Kalliopuska, J. & Oja, A., 2014, In : Journal of Instrumentation. 9, 9 p., C12024.

Research output: Contribution to journalArticleScientificpeer-review

Radiation Detectors
Radiation detectors
radiation detectors
Gallium Arsenide
purity
2 Citations (Scopus)

Fabrication, electrical characterization and reliability study of partially electroplated tapered copper through-silicon vias

Dixit, P., Viljanen, H., Salonen, J., Molarius, J. & Monnoyer, P., 2013, Proceedings : 8th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2013. Institute of Electrical and Electronic Engineers IEEE, p. 190-193

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Acoustic impedance
Copper
Fabrication
Silicon
MEMS

Networks of innovation relationships: multiscopic views on Finland

Still, K., Huhtamäki, J., Russell, M. G., Basole, R. C., Salonen, J. & Rubens, N., 2013, Proceedings of the XXIV ISPIM Conference. Innovating in Global Markets: Challenges for Sustainable Growth. ISPIM 2013. Conn, K. R. E., Conn, S., Torkkeli, M., Schneider, S. & Bitran, I. (eds.). International Society for Professional Innovation Management ISPIM

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Finland
Innovation
Visualization
Shared understanding
Data sharing

Screening of ALD thin films for Cu diffusion barrier applications

Puurunen, R. L., Salonen, J., Nurmela, A., Ylivaara, O., Viljanen, H., Molarius, J., Monnoyer, P., Yliniemi, S., Pudas, M., Lehto, T., Lehto, T. & Li, W-M., 2013, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

13 Citations (Scopus)

Effect of Process Gases on Fabricating Tapered Through-Silicon vias by Continuous SF6/O2/Ar Plasma Etching

Dixit, P., Vähänen, S., Salonen, J. & Monnoyery, P., 2012, In : ECS Journal of Solid State Science and Technology. 1, 3, p. P107-P116 9 p.

Research output: Contribution to journalArticleScientificpeer-review

Plasma etching
Silicon
Gases
Flow rate
Etching