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James R. Dekker
Senior Scientist
,
BA6201 MEMS
Phone
+358408202025
2003
2022
Research activity per year
Overview
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Projects
(1)
Research output
(61)
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Dive into the research topics where James R. Dekker is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Weight
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Physics
Wafer
100%
Resonator
94%
Microelectromechanical System
57%
Silicon
45%
Etching
18%
Temperature
18%
Microelectromechanical System
17%
Vacuum
16%
Atomic Layer Epitaxy
16%
Fabrication
14%
Stiction
14%
Frequencies
14%
Elasticity
13%
Gaps
12%
Encapsulation
12%
Utilization
12%
Variations
10%
Engineering
Microelectromechanical System
87%
Cavity
43%
Silicon on Insulator
25%
Surfaces
21%
Direct Bonding
18%
Temperature
16%
Test Structure
16%
Atomic Layer Deposition
16%
Wafer Bonding
14%
Thickness
14%
Stiction
14%
Substrates
14%
Diaphragm
13%
Fabrication
13%
Silicon Wafer
13%
Applications
13%
Cap Wafer
12%
Elastic Constant
12%
Titanium Dioxide
12%
Resonance Mode
11%
Doping Level
10%
Filters
10%
Measurement
10%
Chemistry
Procedure
48%
Concentration
21%
Sample
17%
Microelectromechanical System
14%
Surface
13%
Structure
12%
Device
12%
Reaction Temperature
11%
Inductor
11%
Dissociation Energy
10%
Sensor
10%
Atomic Layer Epitaxy
10%