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James R. Dekker
Senior Scientist
,
BA6201 MEMS
Phone
+358408202025
2003
2020
Research activity per year
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Research output
(57)
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(12)
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Dive into the research topics where James R. Dekker is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Engineering & Materials Science
MEMS
72%
Silicon
69%
Resonators
58%
Wafer bonding
35%
Microsystems
29%
Packaging
22%
Optical waveguides
21%
Quartz
19%
Photonic crystals
19%
Atomic layer deposition
18%
Vacuum
17%
Clocks
17%
Fabrication
16%
Diaphragms
15%
Silicon wafers
15%
Waveguides
15%
Etching
13%
Electrostatics
13%
Doping (additives)
12%
Substrates
12%
Application specific integrated circuits
11%
Stiction
11%
Crystals
11%
Plasmas
11%
Elastic constants
11%
Deep level transient spectroscopy
10%
Timing devices
10%
Temperature
10%
Physics & Astronomy
microelectromechanical systems
100%
wafers
57%
silicon
55%
resonators
42%
packaging
26%
SOI (semiconductors)
24%
stiction
21%
insulators
19%
cavities
18%
atomic layer epitaxy
14%
diaphragms
14%
temperature compensation
11%
elastic properties
11%
fabrication
10%
Chemical Compounds
Photonic Crystal
15%
Vacuum
12%
Etching
11%
Oxide
10%
