Research output per year
Research output per year
Research output
Search results
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2013
Wafer level MEMS encapsulation using SLID bonding
Suni, T., Xu, H., Heikkinen, H., Dekker, J., Vuorinen, V., Jaakkola, A., Monnoyer, P. & Paulasto-Kröckel, M., 2013, Book of abstracts. Stockholm, p. 105-106Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
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2005
Development of multi-step processing in silicon-on-insulator for optical waveguide applications
Solehmainen, K., Aalto, T., Dekker, J., Kapulainen, M., Harjanne, M. & Heimala, P., 2005, European Optical Society Topical Meeting on Optical Microsystems, OµS'05: Book of Abstracts. 111Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
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Wafer scale encapsulation of MEMS by direct bonding
Suni, T., Henttinen, K., Dekker, J., Luoto, H., Kulawski, M. & Kattelus, H., 2005, 16th Micromechanics Europe Workshop: Book of abstracts. Göteborg, p. 119-122Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific