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James R. Dekker

  • Phone+358408202025
20032022

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  • 2008

    Direct bonding of oxidized cavity wafers

    Palokangas, M., Dekker, J., Henttinen, K. & Mäkmen, J., 2008, In: ECS Transactions. 16, 8, p. 457-463

    Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

    4 Citations (Scopus)
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