James R. Dekker

Research output

Research output per year 2003 2020

• 28 Conference article in proceedings
• 22 Article
• 3 Conference abstract in proceedings
• 2 Conference article
• 2 More
  • 1 Chapter or book article
  • 1 Article in a proceedings journal

Research output per year

Research output per year

Search results

• 2008

  Direct bonding of oxidized cavity wafers

  Palokangas, M., Dekker, J., Henttinen, K. & Mäkmen, J., 2008, In: ECS Transactions. 16, 8, p. 457-463

  Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

  • MEMS 100%
  • Oxidation 95%
  • Thermooxidation 72%
  • Etching 57%
  • Oxides 46%
  4 Citations (Scopus)