INIS
substrates
92%
waveguides
84%
thin films
84%
fabrication
81%
sensors
73%
alignment
62%
hybrids
49%
polymers
46%
surfaces
46%
actuators
46%
optical fibers
46%
piezoelectricity
46%
optics
46%
layers
46%
ceramics
39%
applications
37%
comparative evaluations
37%
molds
36%
design
33%
levels
32%
silicon
32%
low temperature
32%
masks
30%
coupling
30%
plastics
30%
ferroelectric materials
27%
processing
27%
sheets
26%
performance
26%
manufacturing
24%
aging
23%
supply
23%
radiowave radiation
23%
monitoring
23%
stability
23%
detection
23%
removal
23%
resist
23%
residues
23%
critical temperature
23%
indicators
23%
chains
23%
cost
20%
food
18%
production
18%
deposition
17%
values
17%
refractive index
16%
pzt
16%
devices
15%
Keyphrases
Waveguide
85%
Unimorph Actuator
46%
Optical Fiber Alignment
46%
Piezoelectric Thin Film
46%
Low Temperature Co-fired Ceramic
38%
Silicon Substrate
36%
Roll-to-roll
36%
Nanoimprint
34%
Refractive Index
30%
Direct Patterning
30%
Fabrication Methods
28%
Thin-film Actuators
26%
Waveguide Structure
26%
Photonic Module
26%
Photo-crosslinkable
23%
Optical Structure
23%
Residue Detection
23%
Hybrid Materials
23%
MEMS Structure
23%
Radio Frequency Microelectromechanical Systems (RF MEMS)
23%
Photoresist Layer
23%
Ferroelectric Materials
23%
Resist Removal
23%
Lithography
23%
Aging Stability
23%
Slab Waveguide
23%
Barium Titanate
23%
Removal Methods
23%
Optical Modulator
23%
Prism Coupling
23%
Photonic Integration
23%
LTCC Substrate
23%
Analytical Method
23%
Multi-slot
23%
High Performance
23%
Integrated Optics
23%
Thin Film Fabrication
23%
Plasmonics
23%
Optical Interconnects
23%
Nanoimprint Lithography
23%
UV Nanoimprint
23%
Nanophotonic Sensor
23%
Slot Waveguide
23%
Radio Frequency Identification
23%
Temperature Indicator
23%
Supply Chain Monitoring
23%
Polymer-based
23%
SERS Detection
23%
Organic Photovoltaics
23%
Optical Sensor
23%
Material Science
Waveguide
100%
Thin Films
78%
Low Temperature Co-Fired Ceramics
55%
Actuator
46%
Piezoelectricity
46%
Lithography
46%
Surface (Surface Science)
44%
Surface-Enhanced Raman Spectroscopy
38%
Silicon
28%
Fiber Optics
27%
Ferroelectric Material
23%
Analytical Method
23%
Photovoltaic Modules
23%
Organic Solar Cells
23%
Microelectromechanical System
23%
Hybrid Material
23%
Glass Fiber
23%
Electronic Circuit
20%
Refractive Index
16%
Birefringence
16%
Ferroelectric Thin Films
16%
Optical Device
15%
Ion Implantation
11%
Crystal Orientation
11%
Optical Property
11%
Dielectric Property
11%
Pulsed Laser Deposition
11%
Magnesium Oxide
11%
Crystal Lattice
11%
Thin Film Deposition
11%
Single Crystal
11%
Crystal Structure
11%
Ceramic Substrate
11%
