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Jyrki Kiihamäki

1991 …2019
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Fingerprint Dive into the research topics where Jyrki Kiihamäki is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 2 Similar Profiles
Silicon Chemical Compounds
silicon Physics & Astronomy
microelectromechanical systems Physics & Astronomy
etching Physics & Astronomy
Etching Engineering & Materials Science
MEMS Engineering & Materials Science
Resonators Engineering & Materials Science
Micromechanical resonators Engineering & Materials Science

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Research Output 1991 2019

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 22 May 2019, (Submitted) International Microelectronics and Packaging Society, Nordic: NordPac 2019.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Encapsulation
MEMS
Mirrors
Copper
Temperature

Mechanical property mapping of ALD thin films

Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S., Koskinen, J. & 3 others, Ronkainen, H., Hannula, S-P. & Kiihamäki, J., 2015, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

ALD membrane strength measurement with a stylus profilometer

Gao, F., Puurunen, R., Laukkanen, A., Kilpi, L., Ronkainen, H. & Kiihamäki, J., 2013.

Research output: Contribution to conferenceConference PosterScientific

9 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleScientificpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems

Stress in atomic layer deposited aluminium oxide and titanium dioxide thin films

Ylivaara, O., Puurunen, R. L., Laitinen, M., Sintonen, S., Ali, S., Sajavaara, T., Lipsanen, H. & Kiihamäki, J., 2012, Technical Program and Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

dioxides
titanium oxides
aluminum oxides
thin films
temperature