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Jyrki Kiihamäki

  • Phone+358405069276
1991 …2019

Research output per year

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Research Output

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 5 p. 8760353

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

    Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 4 p. 8925660

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

  • 1 Citation (Scopus)

    Mechanical property mapping of ALD thin films

    Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S., Koskinen, J. & 3 others, Ronkainen, H., Hannula, S-P. & Kiihamäki, J., 2015, Technical Program & Abstracts. American Vacuum Society AVS

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    ALD membrane strength measurement with a stylus profilometer

    Gao, F., Puurunen, R., Laukkanen, A., Kilpi, L., Ronkainen, H. & Kiihamäki, J., 2013.

    Research output: Contribution to conferenceConference PosterScientific

    Microneedle

    Gao, F., Kiihamäki, J., Hokkanen, A. & Heimala, P., 8 Mar 2012, IPC No. C23F 1/02, Patent No. US2012058506 A1, 20 Apr 2010, Priority date 20 Apr 2010, Priority No. WO2010FI50318

    Research output: PatentPatent application