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Jyrki Kiihamäki

1991 …2019
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  • 2 Similar Profiles
Silicon Chemical Compounds
silicon Physics & Astronomy
microelectromechanical systems Physics & Astronomy
etching Physics & Astronomy
Etching Engineering & Materials Science
MEMS Engineering & Materials Science
Resonators Engineering & Materials Science
Micromechanical resonators Engineering & Materials Science

Research Output 1991 2019

Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers , p. 12-16 8760353

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Encapsulation
MEMS
Mirrors
Copper
Temperature

Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., 2019, 2019 IEEE International Ultrasonics Symposium (IUS). IEEE Institute of Electrical and Electronic Engineers , p. 1977-1980 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

microelectromechanical systems
field of view
mirrors
frequency scanning
aluminum nitrides

Mechanical property mapping of ALD thin films

Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S., Koskinen, J. & 3 others, Ronkainen, H., Hannula, S-P. & Kiihamäki, J., 2015, Technical Program & Abstracts. American Vacuum Society AVS

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

ALD membrane strength measurement with a stylus profilometer

Gao, F., Puurunen, R., Laukkanen, A., Kilpi, L., Ronkainen, H. & Kiihamäki, J., 2013.

Research output: Contribution to conferenceConference PosterScientific

10 Citations (Scopus)

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Puurunen, R., Häärä, A., Saloniemi, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamäki, J., Santala, E., Leskelä, M. & Kattelus, H., 2012, In : Sensors and Actuators A: Physical. 188, p. 240-245 6 p.

Research output: Contribution to journalArticleScientificpeer-review

stiction
Stiction
Atomic layer deposition
atomic layer epitaxy
microelectromechanical systems