Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
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SDG 6 Clean Water and Sanitation -
SDG 9 Industry, Innovation, and Infrastructure
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Collaborations and top research areas from the last five years
Projects
- 1 Active
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GENESIS: GENerate in Europe a Sustainable Industry for Semiconductor
Ylivaara, O. M. E. (Manager), Saari, H. (Participant) & Kiihamäki, J. (CoI)
1/05/25 → 30/04/28
Project: EU project
Research output
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Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror
Ailas, H., Saarilahti, J., Pensala, T. & Kiihamäki, J., 11 Jun 2019, 2019 IMAPS Nordic Conference on Microelectronics Packaging, NORDPAC 2019. IEEE Institute of Electrical and Electronic Engineers, p. 12-16 8760353Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
3 Link opens in a new tab Citations (Scopus) -
Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications
Pensala, T., Kyynäräinen, J., Dekker, J. R., Gorelick, S., Pekko, P., Pernu, T., Ylivaara, O. M. E., Gao, F., Morits, D. & Kiihamäki, J., Oct 2019, 2019 IEEE International Ultrasonics Symposium, IUS 2019. IEEE Institute of Electrical and Electronic Engineers, p. 1977-1980 8925660Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
22 Link opens in a new tab Citations (Scopus) -
Mechanical property mapping of ALD thin films
Puurunen, R. L., Ali, S., Arstila, K., Berdova, M., Haimi, E., Heikkinen, H., Julin, J., Kilpi, L., Laitinen, M., Liu, X., Lyytinen, J., Malm, J., Pyymaki-Perros, A., Rontu, V., Sintonen, S., Ylivaara, O., Sajavaara, T., Lipsanen, H., Franssila, S. & Koskinen, J. & 3 others, , 2015, Technical Program & Abstracts. American Vacuum Society (AVS)Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific
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ALD membrane strength measurement with a stylus profilometer
Gao, F., Puurunen, R., Laukkanen, A., Kilpi, L., Ronkainen, H. & Kiihamäki, J., 2013.Research output: Contribution to conference › Conference Poster › Scientific
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Micromechanical resonator array and method for manufacturing thereof
Jaakkola, A. (Inventor), Pensala, T. (Inventor) & Kiihamäki, J. (Inventor), 19 Jun 2013, IPC No. H03H 9/ 50 A I, Patent No. EP2603975, Priority date 11 Aug 2011, Priority No. WO2011FI50711Research output: Patent › Patent